“…Dielectric materials are typically employed in flexible sensors as part of field-effect transistors used to detect or process the desired signals, as well as part of capacitive sensors. Dielectrics compatible with flexible substrates are either inorganic, such as Al 2 O 3 [23,33,34,217,237], SiO 2 [14,15,28,30,31,34,217,218,222], HfO 2 [289,290], TiO 2 [13], or organic materials e.g., polyvinylphenol (PVP) [29,239], polyvinylpyrrolidone [170], poly(perfluorobutenylvinylether) CYTOP [10,291], PDMS [25], polylactide (PLA) [292,293], poly(vinylidene fluoride) PVDF [294][295][296], PVDF-Trifluoroethylene (PVDF-TrFE) [11,[297][298][299][300][301][302], or GO [303]. Al 2 O 3 is widely used in flexible sensors due to the possibility to deposit this material using atomic layer deposition (ALD) at room temperature (33 • C) and obtain dense (2.5 g/cm 3 ) films with a dielectric constant of 7.5, a breakdown voltage of 3.7 MV/cm and leakage currents below 10 -7 A/cm 2 (5 V bias) [304].…”