2016
DOI: 10.1111/jmi.12312
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Inline electron holography and VEELS for the measurement of strain in ternary and quaternary (In,Al,Ga)N alloyed thin films and its effect on bandgap energy

Abstract: We present the use of (1) dark-field inline electron holography for measuring the structural strain, and indirectly obtaining the composition, in a wurtzite, 4-nm-thick InAlGaN epilayer on a AlN/GaN/AlN/GaN multinano-layer heterosystem, and (2) valence electron energy-loss spectroscopy to study the bandgap value of five different, also hexagonal, 20-50-nm-thick InAlGaN layers. The measured strain values were almost identical to the ones obtained by other techniques for similarly grown materials. We found that … Show more

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Cited by 4 publications
(3 citation statements)
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“…They are both lattice matched to GaN, and their calculated band gaps are direct and larger than GaN, 4.63 and 3.74 eV, respectively, which may be potentially suitable for UV optoelectronic applications. It should be noted that the formation of quaternary wurtzitic nitrides has been scarcely reported as claimed in their study, with only a few examples such as CaAlSiN 3 and CaGaSiN 3 , as well as alloyed thin films of Al x Ga 1– x – y In y N , and ZnSn x Ge 1– x N 2 . , …”
Section: Introductionmentioning
confidence: 78%
“…They are both lattice matched to GaN, and their calculated band gaps are direct and larger than GaN, 4.63 and 3.74 eV, respectively, which may be potentially suitable for UV optoelectronic applications. It should be noted that the formation of quaternary wurtzitic nitrides has been scarcely reported as claimed in their study, with only a few examples such as CaAlSiN 3 and CaGaSiN 3 , as well as alloyed thin films of Al x Ga 1– x – y In y N , and ZnSn x Ge 1– x N 2 . , …”
Section: Introductionmentioning
confidence: 78%
“…As a wide-band gap semiconductor, GaN has attracted wide attention for its applications in blue optoelectronic, high-power, and high-frequency devices. , To engineer the band gap and band structure of GaN for ultraviolet applications, ternary AlGaN (Al x Ga 1– x N) and quaternary AlGaInN (Al x Ga 1– x – y In y N) alloys have been synthesized. GaN/AlGaN and GaN/AlGaInN superlattices are grown for multiquantum-well-based ultraviolet light-emitting diodes (LEDs). , Although this is the most established method to engineer the band structure of GaN-based devices, the composition nonuniformity and the GaN/AlGaInN lattice-mismatch hindered the improvement of device performance .…”
Section: Introductionmentioning
confidence: 99%
“…GaN/AlGaN and GaN/AlGaInN superlattices are grown for multiquantum-well-based ultraviolet light-emitting diodes (LEDs). , Although this is the most established method to engineer the band structure of GaN-based devices, the composition nonuniformity and the GaN/AlGaInN lattice-mismatch hindered the improvement of device performance . (Note that the homogeneous AlGaInN alloys had been successfully fabricated in recent studies. )…”
Section: Introductionmentioning
confidence: 99%