Innovative surface acoustic wave sensor for accurate measurement of subatmospheric pressure

Nicolay, Pascal; Elmazria, O.; Sarry, F.; Bouvot, L.; Marche, N.; Kambara, Homare

doi:10.1063/1.2908038

Cited by 23 publications

(18 citation statements)

References 3 publications

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“…This has been utilized to develop the SAW based strain sensor. Many researchers have addressed significant investigation on SAW strain sensors, these strain based sensors can also detect force, 9 pressure, 10,11 etc. To name a few, Stoney et al reported a passive wireless strain sensor on AT-X quartz with a single port SAW resonator; 12 Konno et al developed an oscillator-based strain sensor using a SAW resonator on lithium niobate (LiNbO 3 ); 13 Hempel et al presented a SAW strain sensor with high precision on Alpha-quartz; 14 and Li et al provided a SAW RFID for temperature and strain sensing on LiNbO 3 .…”

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confidence: 99%

Flexible surface acoustic wave strain sensor based on single crystalline LiNbO3 thin film

Dong

Xuan

et al. 2018

Applied Physics Letters

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Flexible surface acoustic wave (SAW) sensors in the frequency range of 162~325 MHz were developed based on single crystalline LiNbO 3 thin film with dual resonance modes, namely the Rayleigh mode and thickness shear mode (TSM). This SAW sensor could handle a wide strain range up to ±3500 µε owing to its excellent flexibility, which is nearly six times the detecting range of bulk piezoelectric substrate based SAW strain sensors. The sensor exhibited a high sensitivity of 193 Hz/µε with a maximum hysteresis less than 1.5%, much better than those commercially available metallic strai gauges. The temperature coefficients of frequency, for Rayleigh and TSM modes, were-85 and-59 ppm/℃, respectively. No visible deterioration was observed after cyclic bending for hundreds of times, showing its desirable stability and reliability. By utilizing the dual modes, the strain sensor with a self-temperature calibrated capability can be achieved. The results demonstrate that the sensor is an excellent candidate for strain sensing.

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confidence: 99%

Flexible surface acoustic wave strain sensor based on single crystalline LiNbO3 thin film

Dong

Xuan

et al. 2018

Applied Physics Letters

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“…Indeed, at higher pressure, thermal leakage into the surrounding gas (air) increases, which corresponds to a lower resistance to thermal flux between a given surface and the surrounding gas. The resistance value depends on the gas pressure, on the contact surface, on the temperature difference between gas and contact surface and on the surface-air conductivity [3]. The lumped-element model used to simulate the behavior of the sensor is presented in Fig 2. Four main sub-elements have been considered: the supporting PCB (on which the heating resistor and the sensor housing are mounted), the sensor housing, the wire-antenna and the coil.…”

Section: Equivalent System Modelmentioning

confidence: 99%

“…An alternative concept to achieve wireless low pressure measurement with a passive surface acoustic wave (SAW) sensor has been proposed in [3]. It uses the fact that SAW sensors offer the possibility of accurate wireless temperature measurement with fully passive sensors [4].…”

Section: Introductionmentioning

confidence: 99%

A completely wireless and passive low-pressure sensor

Krall

Nicolay

2015

2015 IEEE Tenth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP)

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In this paper we present a low pressure sensor based on the Pirani principle. Conversely to conventional implementations, this novel concept employs a fully wireless approach for energy supply and readout of the sensor. The energy for the used heating element is harvested from conventional power supply lines. Furthermore, we used a fully passive sensor to measure the pressure value. Both parts together offer a flexible sensor concept which can solve current implementation drawbacks of size and wired connection to this kind of sensors. The presented sensor concept is completely autonomous and offers a cheap and flexible alternative to conventional sensors even on places not easy to access and without the need for maintenance. For the whole sensor system a simulation model is derived and the model is compared to measurements. The accuracy of the model for the autonomous sensor is shown over a large area of pressure.

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“…This variation implies the evolution of the device temperature from Teq to Tf (final equilibrium temperature). The temperature variation ΔT= Teq -Tf can be easily expressed by the following equation [5,6]:…”

Section: Working Principle Of the Sensormentioning

confidence: 99%

SAW pressure sensor for vacuum control applications

Nicolay

Elmazria

Sarry

et al. 2009

2009 IEEE International Frequency Control Symposium Joint With the 22nd European Frequency and Time Forum

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A new kind of surface acoustic wave (SAW) sensor has been developed in order to measure sub-atmospheric pressure below 100 mTorr with accuracy better than 0.1 mTorr. It provides an efficient measuring solution in a pressure range inaccessible in past by conventional diaphragm-based SAW sensors. Indeed, due to the small bending force in low pressure and limited sensitivity, diaphragm-based SAW sensors are only suited to monitor relatively high pressure with a precision hardly better than 0.5 Torr. In order to reach precision level better than 1 mTorr at sub-atmospheric pressure for vacuum technology applications, a radically different SAW-based solution is desired. Our device aims to measure sub-atmospheric pressure less than 100 mTorr with a threshold resolution better than 0.1 mTorr. The concept is similar to the one used by Pirani pressure gauges. However, it is claimed that a heated and suspended SAW device may have better sensitivity. A theoretical model based on the basic concepts of gas kinetic theory and thermodynamics is presented. The validity of the model is checked by comparison between theoretical and experimental results.

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Innovative surface acoustic wave sensor for accurate measurement of subatmospheric pressure

Cited by 23 publications

References 3 publications

Flexible surface acoustic wave strain sensor based on single crystalline LiNbO3 thin film

Flexible surface acoustic wave strain sensor based on single crystalline LiNbO3 thin film

A completely wireless and passive low-pressure sensor

SAW pressure sensor for vacuum control applications

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