2015
DOI: 10.1109/ted.2014.2371916
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Insight Into Gate-Induced Drain Leakage in Silicon Nanowire Transistors

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Cited by 126 publications
(30 citation statements)
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“…Multiple-gate transistors such as FinFETs are believed to have smaller GIDL than planar MOSFETs due to the reduction of the electric field provided by the fully depleted body [10], [11]. Although nanowire and nanosheet transistors are usually expected to have negligible GIDL, the strong gate coupling generated by the reduced dimensions is responsible for the increase of the longitudinal band-to-band tunneling (L-BTBT) of electrons from the body to the drain [12], [13], additionally to the transverse BTBT.…”
Section: Introductionmentioning
confidence: 99%
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“…Multiple-gate transistors such as FinFETs are believed to have smaller GIDL than planar MOSFETs due to the reduction of the electric field provided by the fully depleted body [10], [11]. Although nanowire and nanosheet transistors are usually expected to have negligible GIDL, the strong gate coupling generated by the reduced dimensions is responsible for the increase of the longitudinal band-to-band tunneling (L-BTBT) of electrons from the body to the drain [12], [13], additionally to the transverse BTBT.…”
Section: Introductionmentioning
confidence: 99%
“…The GIDL effect in nanowire transistors has been modeled and investigated through simulations and some experimental data, as in [12], [18], [19], at room temperature. To the best of the authors' knowledge, experimental measurements of GIDL at high temperatures were reported only at [9,20].…”
Section: Introductionmentioning
confidence: 99%
“…A ground plane (GP) doping approach has been adopted as an effective approach for suppressing parasitic channel leakage current [5,8] for bulk Si substrate device. Higher the GP doping concentration in the scaled GAA NS-FET may results in other issues, such as bandto-band tunneling (BTBT) induced serious gate-induced drain leakage (GIDL) effect [9], carrier velocity degradations and performance variations [10]. Other approaches for suppressing parasitic-channel effect, such as bottom dielectric isolation approach [11] with additional complexity or silicon on insulator (SOI) substrates [12], have also been reported for better PEC control.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, new transistor architectures and new materials are desired to boost the IC performance with further scaling-down [19,20]. Semiconductor nanowires have demonstrated wide potential applications with respect to their unique properties [21][22][23][24] and possible compatibility with current processing technology, and therefore are likely to be building blocks for future nano-devices [25][26][27][28][29][30].…”
Section: Introductionmentioning
confidence: 99%