Inspection of micro-cracks on solderball surface using a laser scattering method

Quan, Chenggen; Wang, S.H.; Tay, Cho Jui; Shang, Hongpeng; Chan, Kwan-Dick

doi:10.1016/s0030-4018(00)00872-5

Cited by 20 publications

(6 citation statements)

References 7 publications

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“…Recently, many nondestructive inspection systems that use light-scattering from foreign matter particles for their detection have been made commercially available for use in product manufacturing. [9][10][11][12][13][14][15][16] However, these systems identify all light scattering as foreign matter particles on the surface. In addition, if microcracks are hidden under the polished surface of products, they cannot be detected by light-scattering alone.…”

Section: Introductionmentioning

confidence: 99%

Selective detection of microcracks under the surface of glass substrates by non-contact stress-induced light-scattering method with temperature variations

Sakata

Terasaki

2022

Jpn. J. Appl. Phys.

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Demand for flexible electronics is increasing due to recent global movements related to IoT. In particular, the ultra-thin glass substrate can be bent, its use is expanding for various applications such as thin liquid crystal panels. On the other hand, fine-polishing techniques such as chemical mechanical polishing treatments, are important techniques in glass substrate manufacturing. However, these techniques may cause microcracks under the surface of glass substrates because they use mechanical friction. We propose a novel non-contact thermal stress-induced light-scattering method (N-SILSM) using a heating device for inspecting surfaces to detect polishing-induced microcracks. In this report, we carry out the selective detection of microcracks and tiny particles using a N-SILSM with temperature variation. Our results show that microcracks and tiny particles can be distinguished and measured by a N-SILSM utilizing temperature change, and that microcrack size can be estimated based on the change in light-scattering intensity.

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Section: Introductionmentioning

confidence: 99%

Selective detection of microcracks under the surface of glass substrates by non-contact stress-induced light-scattering method with temperature variations

Sakata

Terasaki

2022

Jpn. J. Appl. Phys.

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“…Moreover, the mechanical contact between the stylus and the sample often causes damage. It is well known that the light scattering method has the main advantage of reliability and simplicity [13]. To solve this problem, an optical inspection system based on the light scattering method [14][15][16][17] for rapid surface roughness measurement of AZO thin films is developed in this study.…”

Section: Introductionmentioning

confidence: 99%

Surface roughness characterization of Al-doped zinc oxide thin films using rapid optical measurement

Kuo

2011

Optics and Lasers in Engineering

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“…Commercially available instruments used to detect optical surface defects are mainly based on machine vision technologies. A drawback of some existing methods is the complexity in optical setups and data processing, making them time-consuming and expensive [16]. Their sensitivity is limited, and to inspect defects smaller than several micrometers is difficult.…”

Section: Introductionmentioning

confidence: 99%

Investigation of light scattering for scratch detection

2008

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In this study, a simple experimental setup was established and experiments were carried out to investigate light scattering for scratch detection. Many factors would affect the scratch line detection based on light scattering, such as the size and orientation of the scratches, state of the polarizer, light incident angle, detecting angle of light scattering, and light spot size. It is found that the scattered light intensity depends on the orientation of the scratch lines. The intensity power of scattered light would increase with increasing lines per millimeter on the test plate surface. The detection at the zerodegree detecting angle is more sensitive than that at other detecting angles. It is also found that the scratch detection based on light scattering may be performed using S polarization.

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Inspection of micro-cracks on solderball surface using a laser scattering method

Cited by 20 publications

References 7 publications

Selective detection of microcracks under the surface of glass substrates by non-contact stress-induced light-scattering method with temperature variations

Selective detection of microcracks under the surface of glass substrates by non-contact stress-induced light-scattering method with temperature variations

Surface roughness characterization of Al-doped zinc oxide thin films using rapid optical measurement

Investigation of light scattering for scratch detection

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