Integral fabrication of terahertz hollow-core metal rectangular waveguides with a combined process using wire electrochemical micromachining, electrochemical deposition, and selective chemical dissolution

Bi, Xiaolei; Zeng, Yongbin; Dai, Xingda; Qu, Ningsong

doi:10.1007/s00170-019-04680-4

Cited by 4 publications

(3 citation statements)

References 18 publications

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“…2 The high-precision fabrication of a high-working-frequency terahertz hollow-core metal rectangular waveguides has been successfully realized based on the selective chemical dissolution of a pure-nickel sacrificial mandrel, this novel process of integral fabrication is expected to become a promising manufacturing method for terahertz micro-cavity components. 3 Pure aluminum is a suitable sacrificial mandrel material owing to its high efficiency of chemical dissolution in a dilute acid solution or aqueous alkali. In addition, with its characteristics of low density, electrical conductivity, good thermal and excellent corrosion resistance, pure aluminum microstructures, including microrotor, micromotor, and reflection micromirror array and so on, has been applied to micro-electromechanical systems (MEMS).…”

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confidence: 99%

Micro-Shaping of Pure Aluminum by Intermittent Ultrasonic Oscillation Assisted Wire Electrochemical Micromachining with an Ultra-Low-Concentration Mixed Electrolyte

Zeng

2021

J. Electrochem. Soc.

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Sacrificial mandrels and micro-components made from pure aluminum have considerable application potential for fabricating terahertz micro-cavity components and for MEMS. Although WECMM has significant advantages in micro-shaping micro-components from difficult-to-machine materials, high-quality micro-shaping of pure aluminum has always been very challenging due to its extremely high chemical activity in an aqueous solution. This study analyzes the electrochemical characteristics of pure aluminum and the corresponding machining experiments by traditional WECMM in various electrolytes, and manufactures a high-quality micro-slit with a short machining path in the obtained ultra-low-concentration mixed electrolyte. However, in a continuous long-term WECMM with a long machining path, poor mass transport leads to the accumulation of bubbles around the machining area and the deposition of insoluble products on the wire surface that reduce the machining stability and machining accuracy. Therefore, a mass transport method of using intermittent ultrasonic oscillation is proposed. The principle was expounded, systematic comparative experiments demonstrated the effectiveness of this method in continuous long-time WECMM in improving the machining stability and machining accuracy. Finally, a rectangular mandrel of pure aluminum with a path length greater than 10,000 μm was fabricated. After dissolving the rectangular mandrel, a terahertz hollow-core rectangular waveguide micro-cavity was produced.

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confidence: 99%

Micro-Shaping of Pure Aluminum by Intermittent Ultrasonic Oscillation Assisted Wire Electrochemical Micromachining with an Ultra-Low-Concentration Mixed Electrolyte

Zeng

2021

J. Electrochem. Soc.

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“…Various types of pure-nickel microstructures have been used successfully in micromachines and microsystems, such as the microscopic coil springs of semiconductor devices [ 3 ], the microgear reducer of a microscopic transmission system [ 4 ], the microrotor of a microgyroscope [ 5 ], and the microcantilevers of hydrogen sensors [ 6 ]. Recently, the integral fabrication of a high-working-frequency terahertz rectangular waveguide cavity was reported, and this novel process depends on the manufacture of a pure-nickel sacrificial rectangular mandrel and its selective chemical dissolution [ 7 , 8 ]. The transmission of terahertz signals can be improved significantly through such fabrication of such a cavity, and so a pure-nickel sacrificial rectangular mandrel with controllable size and good surface roughness and fillet radius has great application potential in the manufacturing of terahertz microcavity components.…”

Section: Introductionmentioning

confidence: 99%

“…Cormier et al fabricated pure-nickel pyramidal fin arrays using cold-spray additive manufacturing, but that approach fell short of achieving high dimensional accuracy and good surface accuracy [ 11 ]. Bi et al obtained a pure-nickel rectangular mandrel with controllable size, high dimensional accuracy, good surface roughness and fillet radius by wire electrochemical micromachining, but the low machining efficiency of that method is not conducive to the mass production of pure-nickel rectangular mandrels [ 8 ]. Therefore, it is necessary to explore other types of micromachining technology for pure-nickel microstructures.…”

Section: Introductionmentioning

confidence: 99%

Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size

Meng

2022

Micromachines

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Pure nickel microstructures have been widely used in MEMS and have great application potential as a sacrificial mandrel for fabricating terahertz micro-cavity components. The performance of MEMS and terahertz micro-cavity components can be significantly improved through the use of high-quality pure nickel microstructures. Up to now, microfabrication techniques, such as laser micromachining, wire electrical-discharge machining, and cold-spray additive manufacturing, have been used to machine various types of such microstructures. However, huge challenges are involved in using these micromachining techniques to fabricate pure-nickel microstructures with controllable size and good dimensional accuracy, surface roughness, and edge radius. In this paper, taking the example of a pure-nickel rectangular mandrel that corresponds to the size of the end face of a 1.7-THz rectangular waveguide cavity, the machining processes for the electrochemical deposition of pure-nickel microstructures with controllable size, high dimensional accuracy, and good surface roughness and edge radius are discussed systematically. This proposed method can be used to manufacture various types of high-quality pure-nickel microstructures.

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Miniaturized 3D printed electrochemical platform with optimized Fibrous carbon electrode for non-interfering hypochlorite sensing

et al. 2022

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Integral fabrication of terahertz hollow-core metal rectangular waveguides with a combined process using wire electrochemical micromachining, electrochemical deposition, and selective chemical dissolution

Cited by 4 publications

References 18 publications

Micro-Shaping of Pure Aluminum by Intermittent Ultrasonic Oscillation Assisted Wire Electrochemical Micromachining with an Ultra-Low-Concentration Mixed Electrolyte

Micro-Shaping of Pure Aluminum by Intermittent Ultrasonic Oscillation Assisted Wire Electrochemical Micromachining with an Ultra-Low-Concentration Mixed Electrolyte

Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size

Miniaturized 3D printed electrochemical platform with optimized Fibrous carbon electrode for non-interfering hypochlorite sensing

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