Integral field and multi-object spectrometry with MEMS

Wuttig, Andreas; Riesenberg, Rainer; Nitzsche, G.

doi:10.1117/12.453360

Cited by 5 publications

(4 citation statements)

References 13 publications

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“…This displays the multifunctional part of these sensors. Infrared spectrometry is a case of a technique that can be utilized for optical sensing [135]. In a further notable contribution, Huang and co-workers have also demonstrated [136] the simulation of an integrated optical MEMS accelerometer.…”

Section: Optical Detectionmentioning

confidence: 99%

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

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Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.

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Section: Optical Detectionmentioning

confidence: 99%

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

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“…shows an imager with a real intermediate image plane 1 . If a grating is added as shown in figure 1 (b), the slit scan mode of a field selector generates a spectral image of the whole field.…”

Section: Introductionmentioning

confidence: 99%

<title>Novel optical MEMS/micromechanical devices as field selectors for imaging spectrometry</title>

Riesenberg¹,

Wuttig²

2001

SPIE Proceedings

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Multi-object spectrometry is a special version of imaging spectrometry, where only a relatively small number of objects or interesting image points of a scene is spectrally resolved. This allows to measure nearly all interesting points of a typical astronomical scene within one or only a few measurement steps. The essential component of a multi-object spectrometer is the field selector device, which selects multiple image points for a simultaneous measurement. Reconfigurable field selectors or reconfigurable slit masks can be MEMS, such as micro mirror or micro shutter arrays.Alternative field selectors will be based on micro-mechanical devices and can mostly be referred to as slit positioning systems, since the elements which form the slits are mechanically positioned. Novel examples for such field selectors are an individual micro-mirror element positioner and bar arrays with slit structures. Two layer devices are presented, which form transmissive and reflective slits.The concepts are focused on the near infrared multi-object-spectrometer for the Next Generation Space Telescope.

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“…In recent years, MEMS technologies have been adopted by a number of industries to produce advanced sensors and actuators with unprecedented measurement accuracy, precision and resolution. In addition, MEMS are enabling the development of advanced scientific instruments to perform high‐resolution optical metrology in such fields as chemical analysis and spectroscopy [4, 5], medical instrumentation [6, 7], and 3D optical metrology of shapes and deformations [8, 9].…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, quantitative information about the medium can be obtained by measuring light scattering and absorption spectra. In general, realisation of an optical sensor for optical metrology requires the incorporation of [4–7]:…”

Section: Introductionmentioning

confidence: 99%

Analysis and Optomechanical Characterisation of a MEMS Micromirror Device

Furlong

2009

Strain

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Advances in our analysis and characterisation of a micro-electromechanical system (MEMS) micromirror device are presented. The micromirror device, to be used as an integral component of an interferometer, has a characteristic dimension of 510 lm and operates in a dynamic mode with maximum out-of-plane displacements in the order of 10 lm at oscillation frequencies of up to 1.3 kHz. Developments are carried out by analytical, computational and experimental methods. Analytical and computational nonlinear geometrical models are developed in order to determine the optimal loading-displacement operational characteristics of the micromirror. Because of the operational mode of the micromirror, the experimental characterisation of its loading-displacement transfer function requires utilisation of advanced optical metrology methods. Optoelectronic holographic microscopy (OEHM) methodologies, based on multiple wavelengths being developed to perform such characterisation, are described. The micromirror device is suitable for optical phase measurements and applicable to development of miniaturised optical metrology systems for characterisation of shapes and deformations.

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Integral field and multi-object spectrometry with MEMS

Cited by 5 publications

References 13 publications

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

<title>Novel optical MEMS/micromechanical devices as field selectors for imaging spectrometry</title>

Analysis and Optomechanical Characterisation of a MEMS Micromirror Device

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