This paper proves that an integral line-of-sight guidance law for path following control of underactuated marine vessels provides uniform semiglobal exponential stability. The stability result is stronger than what has been proved in previous literature, with stronger convergence properties and more robustness. The analysis is based on the 3-dimensional maneuvering control model of marine vessels, which describes both surface vessels and underwater vehicles moving in a horizontal plane. Both the kinematics and dynamics of the system is taken into account, as well as disturbances from constant and irrotational ocean currents. Simulation results are presented to validate the theoretical analysis.