2022 IEEE 15th Workshop on Low Temperature Electronics (WOLTE) 2022
DOI: 10.1109/wolte55422.2022.9882600
|View full text |Cite
|
Sign up to set email alerts
|

Integrated Cryo-CMOS Temperature Sensors for Quantum Control ICs

Abstract: This work presents an experimental study of different components (resistors, diodes, transistors) in a standard 40-nm bulk CMOS process for their suitability as integrated cryogenic temperature sensors down to a temperature of 4.2 K. It was found that most devices can be employed as sensors down to temperatures of approximately 50 K, below which non-ideal effects such as non-linear behaviour and decreased sensitivity start to dominate. The Dynamic-Threshold MOS (DTMOS) was found to be a very promising candidat… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
3
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
6

Relationship

0
6

Authors

Journals

citations
Cited by 7 publications
(6 citation statements)
references
References 12 publications
0
3
0
Order By: Relevance
“…Finally, the resistors that are required for most references also suffer from a temperature dependence. To minimize these effects, n-type unsilicided poly resistors will be used, which vary less than 5% over temperature [28]. Furthermore, the reference voltage will mostly be set by a ratio of resistors, hence making it less vulnerable to changes in absolute resistance.…”
Section: Cryo-cmos Design Challengesmentioning
confidence: 99%
“…Finally, the resistors that are required for most references also suffer from a temperature dependence. To minimize these effects, n-type unsilicided poly resistors will be used, which vary less than 5% over temperature [28]. Furthermore, the reference voltage will mostly be set by a ratio of resistors, hence making it less vulnerable to changes in absolute resistance.…”
Section: Cryo-cmos Design Challengesmentioning
confidence: 99%
“…Applying FBB via the bulk contact may be potentially limited by the high substrate resistance at cryogenic temperature, as indicated by typical N-well resistances up to a few G /□ at 4.2 K [29], [30]. If such large bulk resistance (R B in Fig.…”
Section: Limitations Of Cryogenic-aware Fbbmentioning
confidence: 99%
“…For implementation of all resistors on this work, we used unsilicided n-type polysilicon due to its stability at cryogenic temperatures. In [43], a change in resistance of ≈5% was measured between cryogenic and RT.…”
Section: A Cyrogenic Circuit Designmentioning
confidence: 99%