2008
DOI: 10.1002/adma.200701415
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Integrated Direct DNA/Protein Patterning and Microfabrication by Focused Ion Beam Milling

Abstract: Single and binary component patterning and integrated microfabrication of biomolecules, such as DNA and proteins, can be achieved by focused ion‐beam (FIB) biolithography. Well‐defined micropatterns are obtained by FIB milling on biomolecules immobilized on SiO2 wafers and protected by a thin Au film. The retention of biofunctionality is excellent (68–90%) and a feature size of down to 500 nm can be achieved for the patterns without significant loss of functionality.

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Cited by 17 publications
(16 citation statements)
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“… 8 , 9 In recent years, advances in the areas of microfabrication and nanofabrication have influenced various techniques used to deliver proteins to underlying surfaces. Methods developed so far to localize proteins on surfaces include manual and robotic delivery, 10 microcontact printing, 11 , 12 capillary force lithography, 13 imprint and nanoimprint lithography, 14 , 15 particle lithography, 16 microfluidic channel networks, 17 focused-ion-beam patterning, 18 inkjet deposition, 19 and dip-pen and related scanning probe lithography. 20 , 21 Table 1 classifies these techniques on the basis of the pattern size and transfer approach to partitioning proteins on surfaces.…”
Section: Methods Of Assembling Proteins On Surfacesmentioning
confidence: 99%
See 1 more Smart Citation
“… 8 , 9 In recent years, advances in the areas of microfabrication and nanofabrication have influenced various techniques used to deliver proteins to underlying surfaces. Methods developed so far to localize proteins on surfaces include manual and robotic delivery, 10 microcontact printing, 11 , 12 capillary force lithography, 13 imprint and nanoimprint lithography, 14 , 15 particle lithography, 16 microfluidic channel networks, 17 focused-ion-beam patterning, 18 inkjet deposition, 19 and dip-pen and related scanning probe lithography. 20 , 21 Table 1 classifies these techniques on the basis of the pattern size and transfer approach to partitioning proteins on surfaces.…”
Section: Methods Of Assembling Proteins On Surfacesmentioning
confidence: 99%
“…In the past, various processes such as UV lithography, microcontact printing, and focused ion beam milling have been employed in order to create chemically defined surface areas for localized protein adsorption on solid surfaces. 11 , 12 , 18 Self-assembled monolayers have also been used for the chemical patterning of substrates for subsequent protein adsorption. 29 For the physical modification of solid substrates ahead of protein deposition, alterations to delineate the surface areas are performed by laser ablation, 30 reactive ion etching, 31 and sputtering.…”
Section: Controlled Nanoscale Protein Adsorption Through Self-assemblmentioning
confidence: 99%
“…Although e-beam lithography and focused ion-beam lithography are able to create a large variety of nanopatterns [290][291][292][293], the cost and time to write them are disadvantageous when compared to the parallel nanopatterning methods described in section 4.1. These important disadvantages have seen the use of these two nanopatterning techniques limited.…”
Section: Serial Nanopatterning Methodsmentioning
confidence: 99%
“…Nanostructures used in near field optics [1][2][3] material science [4,5], and biological applications [6,7] can easily be realised using Focused Ion Beam (FIB) technique. In this work three applications developed in our laboratories are presented in order to highlight the versatility of FIB technique.…”
Section: Introductionmentioning
confidence: 99%