2018
DOI: 10.1038/s41586-018-0551-y
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Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages

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Cited by 1,840 publications
(979 citation statements)
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References 43 publications
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“…This result is consistent with that predicted in Figure 4a. We note that the PW with the etching depth of H rib = 400 nm cannot support the TE 10 and hence supports only the fundamental mode TE 00 . We note that the PW with the etching depth of H rib = 400 nm cannot support the TE 10 and hence supports only the fundamental mode TE 00 .…”
Section: Single-mode Conditionmentioning
confidence: 81%
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“…This result is consistent with that predicted in Figure 4a. We note that the PW with the etching depth of H rib = 400 nm cannot support the TE 10 and hence supports only the fundamental mode TE 00 . We note that the PW with the etching depth of H rib = 400 nm cannot support the TE 10 and hence supports only the fundamental mode TE 00 .…”
Section: Single-mode Conditionmentioning
confidence: 81%
“…The LNOI structure has been pioneered by the groups of Osgood [4] and Günter [5] on smaller substrates. To date, many LNOI PW devices have been demonstrated, such as (CMOS-compatible) electro-optic modulator, [10][11][12][13][14][15][16][17][18][19] (electrooptically tunable) micro-ring or micro-disk resonator, [7,[19][20][21][22][23][24][25][26][27][28][29] LNOI heterogeneous photonic device, [19] grating coupler, [30,31] photonic crystal, [7,[32][33][34] transverse-electric/magnetic (TE/TM)pass polarizer, [35] quantum optics device, [36] as well as some nonlinear devices based on periodically poled LNOI (PPLNOI) PWs. in diameter) LNOI thin-film is commercially available.…”
Section: Introductionmentioning
confidence: 99%
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“…Fortunately, in recent years, there has been significant progress in high quality LN micro‐ or nanostructure fabrication, for example, thermal diffusion or proton exchange, laser writing, focused ion milling, plasma dry etching, and so on. Until now, the waveguides, photonic crystals, micro‐cavities, optical frequency converters, superbroad‐bandwidth modulators with the feature sizes of several to hundreds of micrometers have been fabricated. However, how to further reduce the sizes of the LN‐based photonic elements and meanwhile extend their functionalities are still pursued for realizing novel photonic systems with ultracompact fashion.…”
Section: Introductionmentioning
confidence: 99%
“…Lithium niobate on insulator (LNOI) is emerging as a promising platform for photonic technology. Recent works highlight the potential of the high index contrast lithium niobate platform through low-loss waveguides [1], optical modulators [2,3], tunable ring resonators [4][5][6] and nonlinear effects [7]. This platform has potential to make a mark in fields ranging from telecommunications [2,3] to quantum computing and communication [8] as well as sensing [9]; however, many challenges are yet to be overcome.…”
Section: Introductionmentioning
confidence: 99%