An ever increasing demand for packaging more energy on-board to meet the needs of power hungry microsystems is driving the miniaturization of power generators. We report a fully integrated Power MEMS, in the 10-lL size, designed to deliver high energy and power densities. On-board hydrogen production and an efficient control scheme that facilitates integration with a fuel cell membrane electrode assembly are key elements for micro energy conversion. A millimeter-scale reactor produces hydrogen by hydrolysis of CaH 2 and LiAlH 4 , to yield energy densities of the order of 200 Whr/L. A passive microfluidic control scheme, incorporating surface tension to pump water in a microchannel for hydrolysis and microvalve control using hydrogen backpressure, facilitates delivery and regulation and eliminates bulky auxiliaries that consume parasitic power. We tested the ability of this control scheme to improve uniformity of power delivery during long periods of lower demand, with fast switching to mass transport regime on the order of seconds, and realized peak power density of up to 391.85 W/L. Prototypes have been tested for duty periods from 2-48 h, with multiple switching of power demand in order to establish performance across multiple regimes. Critical to the realization of the integrated power MEMS, and its energy and power density, are effects of water transport and byproduct hydrate swelling on hydrogen production in the microreactor. While CaH 2 showed superior hydrogen release kinetics that enhances power density, LiAlH 4 provided greater energy density due to reduced byproduct expansion that permitted increased hydrogen production.