Mechanical Stress Effect on Ionic Conductivity of Perflurosulfonic Acid (PFSA) Film by Photolithography

Sakurai, Yusuke; Kawai, Maki

doi:10.2494/photopolymer.25.723

Cited by 3 publications

(3 citation statements)

References 8 publications

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“…Numerous studies on optimizing the assembly procedure (such as bolt assembly), especially for the homogenization of the arising mechanical stresses have been reported [126]. A study on the mechanical response of membrane subjected to various clamping conditions observed the formation of pinhole at the center of the membrane which is due to the extreme form of non-uniformity in this constraint configuration [127]. One study observed that clamping stress is conducive to the durability and integrity of the membrane that, however, depends on the design specifications [128].…”

Section: Stack Assembly Effectsmentioning

confidence: 99%

A Critical Assessment on Functional Attributes and Degradation Mechanism of Membrane Electrode Assembly Components in Direct Methanol Fuel Cells

2021

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Direct methanol fuel cells (DMFC) are typically a subset of polymer electrolyte membrane fuel cells (PEMFC) that possess benefits such as fuel flexibility, reduction in plant balance, and benign operation. Due to their benefits, DMFCs could play a substantial role in the future, specifically in replacing Li-ion batteries for portable and military applications. However, the critical concern with DMFCs is the degradation and inadequate reliability that affect the overall value chain and can potentially impede the commercialization of DMFCs. As a consequence, a reliability assessment can provide more insight into a DMFC component’s attributes. The membrane electrode assembly (MEA) is the integral component of the DMFC stack. A comprehensive understanding of its functional attributes and degradation mechanism plays a significant role in its commercialization. The methanol crossover through the membrane, carbon monoxide poisoning, high anode polarization by methanol oxidation, and operating parameters such as temperature, humidity, and others are significant contributions to MEA degradation. In addition, inadequate reliability of the MEA impacts the failure mechanism of DMFC, resulting in poor efficiency. Consequently, this paper provides a comprehensive assessment of several factors leading to the MEA degradation mechanism in order to develop a holistic understanding.

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Section: Stack Assembly Effectsmentioning

confidence: 99%

A Critical Assessment on Functional Attributes and Degradation Mechanism of Membrane Electrode Assembly Components in Direct Methanol Fuel Cells

2021

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“…Several groups have made micro fuel cells integrated on various substrates as a chip scale power source [2][3][4][5]. The authors have reported a fuel cell formed on a PFT film substrate [6]. In this case, semiconductor fabrication process was commonly employed for the multilayer structure fabrication.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Durability of Single Chip Micro Direct Methanol Fuel Cell (SC-^|^mu;DMFC) by Photolithography Process

Sakurai

Tanaka

Ohata

et al. 2013

J. Photopol. Sci. Technol.

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Single chip micro direct methanol fuel cell (SC-µDMFC) is attractive as a chip scale power source for micro electromechanical system (MEMS) devices. A multilayer structure is commonly employed for the fuel cell. The durability of SC-µDMFC should be mostly affected by interface energy. In this study, SC-µDMFC is fabricated by employing a photoresist / Pt electrode / PFSA film multilayer structure. The fabrication of SC-µDMFC (chip size of 2.0mm×2.0mm ×500µm) is succeeded without any film peeling. Consequently, maximum output power of 0.07µW is obtained. The film peeling of SC-µDMFC is also analyzed by the interface energy method. As a result, several layers of weak adhesion are predicted. However, the film peeling could not occur by the contribution of the other mechanical adhesion factors. The experimental results indicate the durability of the SC-µDMFC.

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“…They formed micro channels of 100µm width and 10µm depth on the PFSA film. The authors have discussed that an effect of photoresist film stress on the photoresist/PFSA double layer structure [5].…”

Section: Introductionmentioning

confidence: 99%

Liquid Penetration Control of Photoresist/Perfluorosulfonic Acid (PFSA) Double Layer Structure by Hydrophobic Treatment

Sakurai

Takahashi

Kawai

2013

J. Photopol. Sci. Technol.

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Silicon-based micro fuel cells are considerable interest for micro electromechanical system (MEMS) devices. Micro pattern fabrication by photolithography and etching process is effective for minimization of fuel cells. It is known that the photolithography process is difficult to employ for an electrolyte of perfluorosulfonic acid (PFSA) film due to swelling and peeling under wet process. In order to prevent the problems, a hexamethyldisilazane (HMDS) primer treatment is employed on the interface of photoresist/PFSA. Consequently, photoresist/PFSA double layer structure can be formed on the Si substrate with no defect formation. The double layer structure is selectively etched by reactive ion etching (RIE) process with CF 4 gas in order to fabricate the micro pattern of PFSA film. The effect of HMDS primer treatment is observed as a hydrophobic effect by an analysis of wetting energy. The PFSA film with HMDS primer treatment should prevent to penetrate the liquid into the PFSA film under wet process.

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Mechanical Stress Effect on Ionic Conductivity of Perflurosulfonic Acid (PFSA) Film by Photolithography

Cited by 3 publications

References 8 publications

A Critical Assessment on Functional Attributes and Degradation Mechanism of Membrane Electrode Assembly Components in Direct Methanol Fuel Cells

A Critical Assessment on Functional Attributes and Degradation Mechanism of Membrane Electrode Assembly Components in Direct Methanol Fuel Cells

Fabrication and Durability of Single Chip Micro Direct Methanol Fuel Cell (SC-^|^mu;DMFC) by Photolithography Process

Liquid Penetration Control of Photoresist/Perfluorosulfonic Acid (PFSA) Double Layer Structure by Hydrophobic Treatment

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