2013
DOI: 10.2494/photopolymer.26.727
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Liquid Penetration Control of Photoresist/Perfluorosulfonic Acid (PFSA) Double Layer Structure by Hydrophobic Treatment

Abstract: Silicon-based micro fuel cells are considerable interest for micro electromechanical system (MEMS) devices. Micro pattern fabrication by photolithography and etching process is effective for minimization of fuel cells. It is known that the photolithography process is difficult to employ for an electrolyte of perfluorosulfonic acid (PFSA) film due to swelling and peeling under wet process. In order to prevent the problems, a hexamethyldisilazane (HMDS) primer treatment is employed on the interface of photoresis… Show more

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“…If the circle, liquid intrusion should occur (S<0). The detail of circle model is described in the literature [5].…”
Section: Surface Energy and Liquid Spreading Analysismentioning
confidence: 99%
“…If the circle, liquid intrusion should occur (S<0). The detail of circle model is described in the literature [5].…”
Section: Surface Energy and Liquid Spreading Analysismentioning
confidence: 99%