As a new method for evaluating single crystals and oligocrystals, pulsed neutron Bragg-dip transmission analysis/imaging method is being developed. In this study, a single Bragg-dip profile-fitting analysis method was newly developed, and applied for analyzing detailed inner information in a crystalline grain position-dependently. In the method, the spectrum profile of a single Bragg-dip is analyzed at each position over a grain. As a result, it is expected that changes in crystal orientation, mosaic spread angle and thickness of a perfect crystal can be evaluated from the wavelength, the width and the integrated intensity of the Bragg-dip, respectively. For confirming this effectiveness, the method was applied to experimental data of position-dependent Bragg-dip transmission spectra of a Si-steel plate consisting of oligocrystals. As a result, inner information of multiple crystalline grains could be visualized and evaluated. The small change in crystal orientation in a grain, about 0.4°, could be observed by imaging the Bragg-dip wavelengths. By imaging the Bragg-dip widths, both another grain and mosaic block in a grain were detected. Furthermore, imaging results of the integrated intensities of Bragg-dips were consistent with the results of Bragg-dip width imaging. These small crystallographic changes have not been observed and visualized by previous Bragg-dip analysis methods.

Silicon-based micro fuel cells are considerable interest for micro electromechanical system (MEMS) devices. Micro pattern fabrication by photolithography and etching process is effective for minimization of fuel cells. It is known that the photolithography process is difficult to employ for an electrolyte of perfluorosulfonic acid (PFSA) film due to swelling and peeling under wet process. In order to prevent the problems, a hexamethyldisilazane (HMDS) primer treatment is employed on the interface of photoresist/PFSA. Consequently, photoresist/PFSA double layer structure can be formed on the Si substrate with no defect formation. The double layer structure is selectively etched by reactive ion etching (RIE) process with CF 4 gas in order to fabricate the micro pattern of PFSA film. The effect of HMDS primer treatment is observed as a hydrophobic effect by an analysis of wetting energy. The PFSA film with HMDS primer treatment should prevent to penetrate the liquid into the PFSA film under wet process.

Single chip micro direct methanol fuel cell (SC-µDMFC) is attractive as a chip scale power source for micro electromechanical system (MEMS) devices. A multilayer structure is commonly employed for the fuel cell. The durability of SC-µDMFC should be mostly affected by interface energy. In this study, SC-µDMFC is fabricated by employing a photoresist / Pt electrode / PFSA film multilayer structure. The fabrication of SC-µDMFC (chip size of 2.0mm×2.0mm ×500µm) is succeeded without any film peeling. Consequently, maximum output power of 0.07µW is obtained. The film peeling of SC-µDMFC is also analyzed by the interface energy method. As a result, several layers of weak adhesion are predicted. However, the film peeling could not occur by the contribution of the other mechanical adhesion factors. The experimental results indicate the durability of the SC-µDMFC.