Integrated optical MEMS serially coupled double racetrack resonator based accelerometer

Kolli, Venkateswara Rao; Dudla, Prabhakar; Srinivas, T.

doi:10.1016/j.ijleo.2021.166583

Cited by 5 publications

(2 citation statements)

References 7 publications

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“…Based on the above reasons, the structure of the sensor was changed, the damping area of the material was increased, and the damping of the sensor was increased so that the vibration of the sensor can be rapidly attenuated. The structure can effectively improve the damping coefficient of the system, reduce the time of shock response, and eliminate the problem of signal adhesion [ 31 ]. The movable upper plate, middle plate, and fixed lower plate are all made of palladium silver (Pd-Ag) conductor material, and the ceramic dielectric layer is made of zirconia ceramic material.…”

Section: Design Principlementioning

confidence: 99%

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Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection

Cui,

Chuai,

Huang

et al. 2023

Micromachines

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The problem that the fuze overload signal sticks and is not easily identified by the counting layer during the high-speed intrusion of the projectile is an important factor affecting the explosion of the projectile in the specified layer. A three-pole plate dual-capacitance acceleration sensor based on the capacitive sensor principle is constructed in this paper. The modal simulation of the sensor structure is carried out using COMSOL 6.1 simulation software, the structural parameters of the sensor are derived from the mechanical properties of the model, and finally the physical sensor is processed and fabricated using the derived structural parameters. The mechanical impact characteristics of the model under different overloads were investigated using ANSYS/LS-DYNA, and the numerical simulation of the projectile intrusion into the three-layer concrete slab was carried out using LS-DYNA. Under different overload conditions, the sensor was tested using the Machette’s hammer test and the output signal of the sensor was obtained. The output signal was analyzed. Finally, a sensor with self-powered output, high output voltage amplitude, and low spurious interference was obtained. The results show that the ceramic capacitive sensor has a reasonable structure, can reliably receive vibration signals, and has certain engineering applications in the intrusion meter layer.

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Section: Design Principlementioning

confidence: 99%

“…Generally speaking, the input acceleration range of a capacitive sensor structure with a circular plate is greater than that of a capacitive sensor structure with a square plate of the same size [ 31 ]. Therefore, the electrode plate and dielectric layer are designed to be circular [ 33 ].…”

Section: Design Principlementioning

confidence: 99%