2022
DOI: 10.1111/jmi.13097
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Integrated opto‐mechanical cantilever sensor with a rib waveguide

Abstract: An integrated opto-mechanical cantilever sensor with a rib waveguide is reported in this paper. The device consists of a rib waveguide cantilever with buried waveguides on silicon. The rib cantilever is introduced to match better with the buried waveguide, further for increasing the interface coupling efficiency. With this configuration, single-mode operating can be achieved in transverse direction without decreasing the width of optical waveguide cantilever. The system sensitivity is 1.1 μm -1 which is increa… Show more

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Cited by 3 publications
(2 citation statements)
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“…Zhang et al fabricated an integrated optomechanical cantilever sensor that contained a rib waveguide. The rib waveguide cantilever was connected with hidden waveguides on silicon . For human serum albumin detection, a surface stress mechanical biosensor based on a double-sided Au NP-coated grid-type polydimethylsiloxane membrane and 3D printing has been developed …”
Section: Different Types Of Biosensors For Detectionmentioning
confidence: 99%
“…Zhang et al fabricated an integrated optomechanical cantilever sensor that contained a rib waveguide. The rib waveguide cantilever was connected with hidden waveguides on silicon . For human serum albumin detection, a surface stress mechanical biosensor based on a double-sided Au NP-coated grid-type polydimethylsiloxane membrane and 3D printing has been developed …”
Section: Different Types Of Biosensors For Detectionmentioning
confidence: 99%
“…These devices are of particular interest due to their insensitivity to electromagnetic fields, high resolution, low cost, adaptability, and low power consumption [ 11 ]. In general, optomechanical sensors can be divided into groups, such as the following: Fiber optic sensors, Fiber Bragg Grating (FBG) sensors, photonic crystal sensors, mass spring and cantilever configurations sensors, and quantum devices such as cavity optomechanical sensors [ 14 , 15 , 16 , 17 , 18 , 19 ]. Further categories of optomechanical sensors include nano optomechanical sensors (NOMS) [ 20 ] and micro-opto-electromechanical (MOEMS) sensors [ 21 ].…”
Section: Introductionmentioning
confidence: 99%