Time-to-Digital Converters (TDCs) are key building blocks in time-based mixed-signal systems, used for the digitization of analog signals in time domain. A short survey on state-of-the-art TDCs is given. In order to realize a TDC with picosecond time resolution as well as multi MGy gamma-dose radiation tolerance, a novel multi-stage noise-shaping (MASH) delta-sigma (∆Σ) TDC structure is proposed. The converter, implemented in 0.13 µm, achieves a time resolution of 5.6 ps and an ENOB of 11 bits, when the oversampling ratio (OSR) is 250. The TDC core consumes only 1.7 mW, and occupies an area of 0.11 mm 2 . Owing to the usage of circuit level radiation hardened-by-design techniques, such as passive RC oscillators and constant-gm biasing, the TDC exhibits enhanced radiation tolerance. At a low dose rate of 1.2 kGy/h, the frequency of the counting clock in the TDC remains constant up to at least 160 kGy. Even after a total dose of 3.4 MGy at a high dose rate of 30 kGy/h, the TDC still achieves a time resolution of 10.5 ps with an OSR of 250.