Integrated three-dimensional microelectromechanical devices from processable carbon nanotube wafers

Hayamizu, Yuhei; Yamada, Takeo; Mizuno, Kohei; Davis, Robert C.; Futaba, Don N.; Yumura, Motoo; Hata, Kenji

doi:10.1038/nnano.2008.98

Cited by 263 publications

(204 citation statements)

References 23 publications

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“…Low-density bent CNT micropillars can be transformed into robust, densely packed CNT structures by capillary forming (Fig. 6a,b) 34,36,37 . To do so, the substrate is exposed to a stream of heated acetone vapour, causing acetone to condense onto the CNTs and substrate, and infiltrate each CNT microstructure.…”

Section: Discussionmentioning

confidence: 99%

Strain-engineered manufacturing of freeform carbon nanotube microstructures

et al. 2014

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The skins of many plants and animals have intricate microscale surface features that give rise to properties such as directed water repellency and adhesion, camouflage, and resistance to fouling. However, engineered mimicry of these designs has been restrained by the limited capabilities of top-down fabrication processes. Here we demonstrate a new technique for scalable manufacturing of freeform microstructures via strain-engineered growth of aligned carbon nanotubes (CNTs). Offset patterning of the CNT growth catalyst is used to locally modulate the CNT growth rate. This causes the CNTs to collectively bend during growth, with exceptional uniformity over large areas. The final shape of the curved CNT microstructures can be designed via finite element modeling, and compound catalyst shapes produce microstructures with multidirectional curvature and unusual self-organized patterns. Conformal coating of the CNTs enables tuning of the mechanical properties independently from the microstructure geometry, representing a versatile principle for design and manufacturing of complex microstructured surfaces.

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Section: Discussionmentioning

confidence: 99%

Strain-engineered manufacturing of freeform carbon nanotube microstructures

et al. 2014

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“…They form conics and decrease the number of electron emission sites. The mechanism of CNT bundling can be explained by the fact that capillary and surface tension forces of solutions act on CNTs at their flexible tips during drying (Busta et al, 2004;Futaba et al, 2006;Hayamizu et al, 2008) and that the tips of CNTs gather to each other by the van der Waals interactions after they are completely dried. The density of as-grown CNTs shown in Fig.4 was 4.4×10 9 cm -2 .…”

Section: Effect Of Post Treatment Of Vertically Aligned Cntsmentioning

confidence: 99%

Growth of Vertically Aligned Carbon Nanotubes by RF-DC Plasma Chemical Vapor Deposition

Hayashi¹,

Sawada²,

Takagi³

2011

Carbon Nanotubes - Polymer Nanocomposites

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“…12 Recently, in-situ techniques were also used to characterize the electrical performance of Germanium (Ge) nanowires 13 and MWNTs 14 that were physically welded or connected to the ends of metallic probe tips for NEMS applications. In our work on 3D NEMS, we have examined the nanomechanical properties of the tubes using in situ techniques which are described in Section 3.2.…”

Section: Nems Switch Topologiesmentioning

confidence: 99%

Carbon-based nano-electro-mechanical systems

et al. 2010

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We provide an overview of our work where carbon-based nanostructures have been applied to twodimensional (2D) planar and three-dimensional (3D) vertically-oriented nano-electro-mechanical (NEM) switches. In the first configuration, laterally oriented single-walled nanotubes (SWNTs) synthesized using thermal chemical vapor deposition (CVD) were implemented for forming bridge-type 2D NEMS switches, where switching voltages were on the order of a few volts. In the second configuration, vertically oriented carbon nanofibers (CNFs) synthesized using plasma-enhanced (PE) CVD have been explored for their potential application in 3D NEMS. We have performed nanomechanical measurements on such vertically oriented tubes using nanoindentation to determine the mechanical properties of the CNFs. Electrostatic switching was demonstrated in the CNFs synthesized on refractory metallic nitride substrates, where a nanoprobe was used as the actuating electrode inside a scanning-electron-microscope. The switching voltages were determined to be in the tens of volts range and van der Waals interactions at these length scales appeared significant, suggesting such structures are promising for nonvolatile memory applications. A finite element model was also developed to determine a theoretical pull-in voltage which was compared to experimental results.

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Integrated three-dimensional microelectromechanical devices from processable carbon nanotube wafers

Cited by 263 publications

References 23 publications

Strain-engineered manufacturing of freeform carbon nanotube microstructures

Strain-engineered manufacturing of freeform carbon nanotube microstructures

Growth of Vertically Aligned Carbon Nanotubes by RF-DC Plasma Chemical Vapor Deposition

Carbon-based nano-electro-mechanical systems

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