High machine downtime results in the production process being disrupted. The average engine breakdown in the sterilizer production is 35.66 hours/month. The corrective maintenance method has not been able to guarantee a smooth production process. This study will plan preventive maintenance activities in order to increase the reliability of production machinery and also maintain the smooth production process. The study was carried out by identifying the damage level of a sterilizer machine with the FMEA method. Based on the result of the FMEA method, maintenance planning of the production machine using the Reliability Centered Maintenance (RCM). FMEA indicates that there are 5 highest risk priority number values, namely the IGBT, Mosfet, bearing bushings, rool former and v-block components. For the maintenance planning using the RCM method, the results obtained were the Total Minimum Downtime (TMD) criteria indicates that the optimum turnover interval of Roll Former, Mosfet, V-Block, IGBT, and Bearing Bushing components is 24 days, 23 days, 25 days, 26 days, and 22 days. The recommendation of the RCM maintenance method has the potential to have a positive impact, namely a decrease in the average critical component downtime of 37,103 % and also an increase in reliability.