Integration of a broad beam ion source with a high-temperature x-ray diffraction vacuum chamber

Abstract

Here, the integration of a low energy, linearly variable ion beam current density, mechanically in situ adjustable broad beam ion source with a high-temperature x-ray diffraction (XRD) vacuum chamber is reported. This allows in situ XRD investigation of phase formation and evolution processes induced by low energy ion implantation. Special care has been taken to an independent adjustment of the ion beam for geometrical directing towards the substrate, a 15 mm small ion source exit aperture to avoid a secondary sputter process of the chamber walls, linearly variable ion current density by using a pulse length modulation (PLM) for the accelerating voltages without changing the ion beam density profile, nearly homogeneous ion beam distribution over the x-ray footprint, together with easily replaceable Kapton(®) windows for x-rays entry and exit. By combining a position sensitive x-ray detector with this PLM-modulated ion beam, a fast and efficient time resolved investigation of low energy implantation processes is obtained in a compact experimental setup.

Comparison of Nitriding Behavior for Austenitic Stainless Steel 316Ti and Super Austenitic Stainless Steel 904L

“…Before and after every experiment, the ion current density is measured using a Faraday cup, with the identical size and shape as the sample holder, placed on the position of the sample holder. The measurements confirmed the high stability of the ion source [19]. The acquisition time for one diffractogram encompassing a 2θ range from 35 to 54 deg is slightly less than 2 min as a position-sensitive linear X-ray detector is used.…”

“…The sample temperature is measured closely to the sample surface during the whole experiment and can be kept constant via a fast control loop. More details on the experimental equipment can be found in [19]. At the same time, the narrow XRD substrate peaks for stainless steel can be used for a temperature control independently of the thermocouple with a resolution of better than 5 K.…”

Intermediate stages of CrN precipitation during PIII nitriding of austenitic stainless steel

“…For 475°C, a decayed phase on top of the expanded phase may be present while higher temperatures show only a decayed phase within the information depth. It has to be pointed out that the purpose of this manuscript is not a time and temperature evolution of the growth and decay of the expanded phase where in situ measurements are much more suited [19].…”