Integration of Optoelectronic Components with LTCC (Low Temperature Co-Fired Ceramic) Microfluidic Structure

Malecha, Karol

doi:10.2478/v10178-011-0067-3

Cited by 13 publications

(6 citation statements)

References 22 publications

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“…It is generally used for fabrication sophisticated micro-and millimetrewave circuits [6][7][8][9] or highly integrated packages [7][8][9][10]. As a result of good electrical and mechanical properties microsystems [11,12], sensors [13,14] and microfluidic devices [15,16] are made in this technology. LTCC technology fulfils all requirements that are necessary to fabricate plasma generator -they are temperature resistant [17,18] and allow three-dimensional structuring [19][20][21] as well as creation of optical connection via fibre [22,23].…”

Section: Introductionmentioning

confidence: 99%

Low temperature co-fired ceramics plasma generator for atmospheric pressure gas spectroscopy

Macioszczyk

Malecha

Roguszczak

et al. 2015

Sensors and Actuators A: Physical

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Section: Introductionmentioning

confidence: 99%

Low temperature co-fired ceramics plasma generator for atmospheric pressure gas spectroscopy

Macioszczyk

Malecha

Roguszczak

et al. 2015

Sensors and Actuators A: Physical

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“…channels, cavities, etc.) into a single, multilayer module (Baeza et al, 2010;Malecha, 2011). Aside from that, the LTCC can also be bonded to other materials, e.g.…”

Section: Introductionmentioning

confidence: 99%

Technology and application of the LTCC-based microfluidic module for urea determination

Malecha

Remiszewska

Pijanowska

2015

Microelectronics International

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Purpose – The purpose of this paper is to focus on the technology and performance of the miniature microfluidic module for urea determination. The presented module was made using low-temperature co-fired ceramics (LTCC). It shows the possibility for the integration of the bioreceptor layers with structures that have been fabricated using modern microelectronic technology. Design/methodology/approach – The presented microfluidic module was fabricated using LTCC technology. The possibility for the fabrication of an enzymatic microreactor in a multilayer ceramic substrate, made of CeramTec glass ceramic (GC) material systems with an integrated thick-film heater, is studied. Different configurations of the LTCC/heater materials (gold, silvers and palladium-silver) are taken into account. The performance of the LTCC-based microfluidic module with the integrated heater and immobilized enzyme was examined experimentally. Findings – A compatible material for the heater embedded in the CeramTec GC-based structures was found. The preliminary measurements made for the test solution containing various concentrations of urea have shown stability (for seven days of operation) and a relatively high signal-to-noise ratio (above 3 pH units) for the microreactor’s output signal. Research limitations/implications – The presented research is a preliminary work which is focused on the fabrication of the LTCC-based microfluidic module, with an integrated heater and immobilized enzyme for urea determination. The device was positively tested using a model reaction of the hydrolysis of urea. However, urea concentration in real (biological) fluid should also be measured. Practical implications – The development of the LTCC-based microfluidic module for urea determination provides opportunity for the construction of a lab-on-chip, or μTAS-type system, for fast medical diagnoses and the continuous monitoring of various biochemical parameters, e.g. for estimating the effectiveness of hemodialysis. Originality/value – This paper shows the design, fabrication and performance of the novel microfluidic module for urea determination, made with LTCC technology.

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“…In this case, it is significant disadvantage because additional optical ports have to be manufactured. The simplest method of light coupling with opaque microfluidic structures is gluing of optical fibers in a postfiring process . However, this technique is problematic and it requires additional materials and technological steps.…”

Section: Introductionmentioning

confidence: 99%

Low‐Temperature Co‐Fired Ceramics System for Light Absorbance Measurement

Czok

Bembnowicz

Gołonka

2013

Int J Applied Ceramic Tech

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The article describes technology of the low-temperature co-fired ceramics (LTCC) structure that enables light absorbance measurements of liquid sample. The manufactured ceramic structure contains buried microfluidic channels. The structure consists of two co-fired glass windows that separate the light source and detector from the test solution. A construction of an electronic measurement system is described as well. The signal from three light-emitting diodes (LED)s -red, green, and blue -can be used in the absorbance measurements. The light intensity is measured by the TCS 3414CS (TAOS, Plano, TX) color detector. Optical properties of the fabricated microfluidic LTCC system is investigated with several concentrations of potassium permanganate (KMnO 4 ) in water solution. The system can be applied in microbiology for constant monitoring of bacterial growth.

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Integration of Optoelectronic Components with LTCC (Low Temperature Co-Fired Ceramic) Microfluidic Structure

Cited by 13 publications

References 22 publications

Low temperature co-fired ceramics plasma generator for atmospheric pressure gas spectroscopy

Low temperature co-fired ceramics plasma generator for atmospheric pressure gas spectroscopy

Technology and application of the LTCC-based microfluidic module for urea determination

Low‐Temperature Co‐Fired Ceramics System for Light Absorbance Measurement

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