Integration of Piezoelectric PZT Thin Films with Internal Electrodes into an Actuator Structure for MEMS Applications

Enhanced electrical properties of PZT thick films prepared by sol–gel technique through step-by-step crystallization process

“…Based on the results of the hysteresis and CV-measurements, a rough estimation of the piezoelectric coefficient d 31 , can be derived by [22][23][24] d 31 ¼ 2e r e 0 P r Q 12 where in the electrostrictive coefficient Q 12 = -3.1 9 10 -2 m 4 /C 2 for the PZT ceramic is assumed as nearly constant. The estimated piezoelectric coefficient for the *1 lm thick PZT film was found to be -134 pC/N.…”

Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si

“…Micro-electromechanical systems (MEMS) have been developing rapidly for a wide variety of applications in the last decade. A wide range of materials have been used in the design and fabrication of MEMS devices and many advanced microfabrication techniques have been developed [1][2][3][4][5]. However, most of the reported piezoelectric MEMS devices are based on lead zirconate titanate (PZT).…”

Nondestructive method for measurement of piezoelectric and dielectric constant, elastic modulus and specific density of thin film piezoelectric cantilevers

“…The full machinery of IC fabrication can be recruited for high quality mass production. Many author s have reported on their progress towards general purpose displacement actuators, such as Duval et al [1], Luginbuhl et al, [2] and Hoffmann et al [3]. Also many author s have reported on methods to use these devices for energy harvesting purposes, such as Jeon et al [4], Reilly et al [5], Fuentes-Fernandez et al [6], Roundy et al [7] and Choi et al [8] and Kim[9] The application of these devices in Atomic Force Microscopy is reported by Fujii et al [10], while the application in micromechanical switches is described by Gross et al, [11].…”