Along with increasing fossil-fuel consumption and greenhouse gas emissions, sustainable energy research has been a global topic for many years. Among all the renewable energy sources, solar energy has been attracting widespread attention because of its abundance, stability and environmental friendliness. Nowadays, more than 90% of the photovoltaic market is dominated by wafer-based silicon solar cells. The cost of this technique, which is dominated by the starting material, is diffi cult to reduce. [ 1 ] Thin fi lm silicon solar cells have an active layer of only several micrometers thick and are believed to be a promising candidate for further cost reduction while maintaining the advantages of bulk silicon. [ 2 ] However, the effi ciency of thin fi lm silicon solar cells critically depends on optical absorption in the silicon layer since silicon has low absorption coeffi cient in the red and near-infrared (IR) wavelength ranges due to its indirect bandgap nature. Therefore, an effective light trapping design is indispensable to achieve high effi ciency modules. To address this problem, several methods are used in current technology, for example, traditional schemes such as textured transparent conductive oxide (TCO) and metal refl ector. [ 3 ] These methods are diffi cult to precisely control and optimize the textured surface. In addition, some other issues should be considered such as enhanced surface recombination due to the roughness of silicon layer [ 4 ] and parasitic loss at the TCO/metal interface. [ 5 ] One, two and three dimensional photonic crystals have also been proposed to enhance the light trapping, [ 6 ] but this design is very diffi cult to be implemented experimentally. A practical approach for light trapping has been demonstrated using diffractive grating structures on the backside of a silicon cell. [ 7 ] However, interference lithography and high temperature processing were usually employed in fabricating this structure, limiting its scalability to large area applications. Previously, we reported fabrication of gratings using self-assembled porous alumina for light trapping in silicon solar cells. [ 8 ] However, the low refractive index of alumina ( n ∼ 1.7) has limited the diffraction effect. Furthermore, in production solar cells the electrolyte used in the anodization process reacts with the TCO resulting in device degradation. To achieve a stronger light trapping effect in production Si thin fi lm solar cell structures while exploiting a more controllable and reliable method for fabrication, here we design a backside photonic structure consisting of a high-index-contrast diffraction grating and a distributed Bragg Refl ector (DBR). We optimize the structure in a thin fi lm microcrystalline silicon ( μ c-Si) solar cell, and implement the design experimentally using a self-assembled mask to demonstrate signifi cantly enhanced cell effi ciency due to increased optical path length. The light trapping structures lead to a signifi cant increase of photon absorption in the red and near-infrared ...