Integration of SOI-Based 2D- and Si-Based 3D Photonic Crystals

Abstract

We present progress towards a generic approach to integrate 2D photonic components embedded in 3D PhCs and couple them to single-mode ridge waveguides. 3D photonic crystals are fabricated by spatially selective self-assembly of silica and PMMA beads into an fcc lattice on a SOI patterned substrate. 2D defect layers are fabricated on 3D PMMA opals by controlled removal of specific beads through electron beam lithography. Simulations of mode matching and coupling efficiencies are presented, which provide guidelines for the fabrication of experimental structures on inverted silicon opals.