Integration of ZnO nanostructures with MEMS for ethanol sensor

Pandya, Hardik J.; Chandra, Sudhir; Vyas, Anoop Lal

doi:10.1016/j.snb.2011.11.063

Cited by 74 publications

(42 citation statements)

References 31 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The obtained results (response, recovery and response time towards ethanol) are better than or comparable to the reported results available in literature 14,23,[32][33][34] . Some reports are also available which are better than our results 16,18,20,21 .…”

Section: Gas Responsesupporting

confidence: 84%

Dip pen nanolithography-deposited zinc oxide nanorods on a CMOS MEMS platform for ethanol sensing

et al. 2015

View full text Add to dashboard Cite

This paper reports on the novel deposition of zinc oxide (ZnO) nanorods using dip pen nanolithographic (DPN) technique on SOI (silicon on insulator) CMOS MEMS (micro electro mechanical system) micro-hotplates (MHP) and their characaterisation as a low-cost, low-power ethanol sensor. The ZnO nanorods were synthesized hydrothermally and deposited on the MHP that comprises a tungsten micro-heater embedded in a dielectric membrane with gold interdigitated electrodes (IDEs) on top of an oxide passivation layer.The micro-heater and IDEs were used to heat up the sensing layer and measure its resistance, respectively. The sensor device is extremely power efficient because of the thin SOI membrane. The electro-thermal efficiency of the MHP was found to be 8.2°C/mW, which results in only 42.7 mW power at an operating temperature of 350°C. The CMOS MHP devices with ZnO nanorods were exposed to PPM levels of ethanol in humid air. The sensitivity achieved from the sensor was found to be 5.8%/ppm to 0.39%/ppm for the ethanol concentration range 25 -1000 ppm. The ZnO nanorods showed optimum response at 350°C.The CMOS sensor was found to have a humidity dependence that needs consideration in realworld application. The sensors were also found to be selective towards ethanol when tested in presence of toluene and acetone. We believe that the integration of ZnO nanorods using DPN lithography with a CMOS MEMS substrate offers a low cost, low power, smart ethanol sensor that could be exploited in consumer electronics.

show abstract

Section: Gas Responsesupporting

confidence: 84%

Dip pen nanolithography-deposited zinc oxide nanorods on a CMOS MEMS platform for ethanol sensing

et al. 2015

View full text Add to dashboard Cite

show abstract

“…They designed and fabricated a micro-heater by using MEMS processes and the screen-printing technique [15]. Pandya et al fabricated an ethanol sensor, where ZnO nanoflakes were grown by annealing an evaporated thin film of Zn at a high temperature [16]. Ting et al demonstrated the lateral growth of ZnO NWs on chips via selfcatalyzed reactive thermal evaporation, and the product can be used for ethanol detection [17], where the number of NWs that bridge the electrodes to one another was increased to enhance the sensitivity of sensors.…”

Section: Introductionmentioning

confidence: 99%

Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors

Nguyen

Quy

Hòa

et al. 2014

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors. Chemical, http://dx.doi. org/10.1016/j.snb.2013.11.043 Access to the published version may require subscription. N.B. When citing this work, cite the original published paper. Sensors and actuators. B, Abstract:The proper engineering design of gas sensors and the controlled synthesis of sensing materials for the high-performance detection of toxic gas are very important in the fabrication of handheld devices. In this study, an effective design for gas sensor chips is developed to control the formation of grown ZnO nanowires (NWs). The design utilizes the dendrite islands of Au catalyst deposited on and between Pt electrodes of a planar-type micro gas sensor so that NWs can grow on instead of a continuous Au seed layer. This method results in an increase of NW-NW junctions on the device and also eliminates current leakage through the seed layer, which results in a higher sensitivity. The results show that the developed gas-sensing devices could be used to monitor NO 2 at moderate temperature (~250 °C) and/or ethanol at a high temperature (~400 °C).

show abstract

“…The commonly used resistive materials for the microheater are Aluminum (Phanakun et al, 2012), Copper (Pandya et al, 2012), Gold (Kim, 2006), Nickel-Chromium (NiCr) alloy (Das and Akhtar, 2014), Platinum (Hsieh et al, 2008), Titanium (Guan and Puers, 2010), and Tungsten (Santra et al, 2010). Aluminum and Copper are susceptible to corrosion and oxidation; therefore, they are avoided as the resistive material for the microheater.…”

Section: Introductionmentioning

confidence: 99%

Design and Simulation of Parallel Microheater

Tiwari¹,

Bhat²,

Mahato³

et al. 2018

Frontiers in Heat and Mass Transfer

View full text Add to dashboard Cite

This paper presents the design and simulation of a thin film microheater. This can have promising applications in bio-medical analysis, explosive detection, gas sensing, and micro-thrusters. An approach is presented to enhance the thermal uniformity of parallel microheater. The modeling of microheater is done using glass as a substrate material. The analysis is carried out with different resistive material for the heater. To study the response of the microheater to the different supply voltage, substrate thickness, and time interval, finite element simulation is carried out with commercial FEM analysis tool-COMSOL Multiphysics 5.2a. The proposed design in Model 1 have high contact resistance and it suffers from the contact-heating problem; however, Model 2 offers an excellent thermal uniformity with a tolerance of 1°C. There is a good agreement between the simulated and the theoretical results.

show abstract

Integration of ZnO nanostructures with MEMS for ethanol sensor

Cited by 74 publications

References 31 publications

Dip pen nanolithography-deposited zinc oxide nanorods on a CMOS MEMS platform for ethanol sensing

Dip pen nanolithography-deposited zinc oxide nanorods on a CMOS MEMS platform for ethanol sensing

Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors

Design and Simulation of Parallel Microheater

Contact Info

Product

Resources

About