2010
DOI: 10.1016/j.apsusc.2010.04.053
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Inter-diffusion study in MgO tunneling magneto-resistive (TMR) system by XPS

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Cited by 11 publications
(6 citation statements)
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“…9 and 10) at T a ¼ 425 C. Crystallization and texturing of CoFeB are important in the applications of spin valves because of their influence on TMR, 11 magnetic anisotropy, 12 and interface scattering. 4 To explain the crystallization process of CoFeB, different multilayer structures with CoFeB were examined by high resolution transmission electron microscopy (HRTEM) cross sectional images, 3,6,9,10,[13][14][15] reflective high-energy electron diffraction, 16 x-ray photoemission spectroscopy, [17][18][19][20] x-ray diffraction (XRD), 2,15,21-24 and x-ray reflectometry (XRR). [24][25][26] These XRD studies did not analyze CoFeB crystallization in P-SV compared to EB-SV.…”
Section: Introductionmentioning
confidence: 99%
“…9 and 10) at T a ¼ 425 C. Crystallization and texturing of CoFeB are important in the applications of spin valves because of their influence on TMR, 11 magnetic anisotropy, 12 and interface scattering. 4 To explain the crystallization process of CoFeB, different multilayer structures with CoFeB were examined by high resolution transmission electron microscopy (HRTEM) cross sectional images, 3,6,9,10,[13][14][15] reflective high-energy electron diffraction, 16 x-ray photoemission spectroscopy, [17][18][19][20] x-ray diffraction (XRD), 2,15,21-24 and x-ray reflectometry (XRR). [24][25][26] These XRD studies did not analyze CoFeB crystallization in P-SV compared to EB-SV.…”
Section: Introductionmentioning
confidence: 99%
“…Previous work using X-ray Photoelectron Spectroscopy (XPS) showed that annealing results in substantial Fe and Co diffusion into the MgO barrier in a simple Ta/CoFe/MgO/Ru stack. 49 Here, EFTEM revealed Co, Fe and O interdiffusion between the barrier and electrodes after annealing, which induces the apparent increase in barrier width. The fact that more Co diffused into the MgO than Fe is attributed to the much higher Co concentration of the FM layers in the as-deposited sample.…”
Section: Results and Discussion I: Effects Of Annealingmentioning
confidence: 75%
“…In terms of magnesium complex in Figure 2A, as leaching progresses, magnesium ferrite (centered at 29.58) [42] disappears as leaching duration reaches over 20 min. By comparing this with Figure 3A (XPS spectra of SL leached by NH 4 Cl at different time), in which significant drop of the intensity of XPS of Mg2p [43] are observed after 20 min, it indicates that the dissolution of magnesium ferrite is a quick process. The following reaction probably occurs during the first 20 min: …”
Section: Characterization Of Solid Residue After Leachingmentioning
confidence: 83%