Inter‐Electrode Distance and Breakdown Voltage in Low Pressure Argon Discharges

Ledernez, Loic; Olcaytug, F.; Urban, G.

doi:10.1002/ctpp.201100053

Cited by 20 publications

(14 citation statements)

References 29 publications

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“…In a wide range of these implementations, the glow discharge occurs between two electrodes located in the discharge oversize, incomparably to systems of inductively coupled or microwave excited. Hence, the reactor design and optimization, including the inter-electrode distance, is one of the key issues in the technical practice [5]. A glow discharge is characterized by its distinctive regions between the cathode and the anode electrodes across the tube.…”

Section: -Introductionmentioning

confidence: 99%

The Electrical Characteristic of Plasma Discharge by Using Different Operating Conditions in Vanadium Sputtering System

Roomy

Al-Gaffer

Khalaf³

2019

ANJS

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This paper report the experimental results of the effects of the inter-electrode distances and applied voltages for various operating pressure on the electrical characteristic of plasma discharge. We have studied the Current-voltage (I-V) characteristics and discharge currentgas pressure (I-P) for different inter-electrode gaps (3, 4, 5, 6, and 8) cm of the planar magnetron discharge. Also Paschen curve were measured at different spacing, The Paschen curves in Ar gas show that the breakdown voltage between two electrodes is a function of pd (The product of the pressure inside the chamber and distance between the electrodes). The results show the sensitivity of electrode separation lead to change the electrical characteristic of generating plasma; where The I-V characteristics of argon gas were deduced as a plasma system operated in abnormal glow discharge region, which is very impotent deposition sputtering. As well as the discharge current was increased for argon plasma discharge with the increasing of the working pressure lead to increase the deposition rate. Paschen curve is analyses at different working pressures and gap distances between two electrodes .the behavior between discharge current and discharge voltage for different gap distances between two electrodes was nonlinear, In addition the experimental finding validated that the suitable electrical characteristics of glow discharge current as a function to applied voltage for varying argon gas pressure at inter-electrode spacing equal to 5 cm.

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Section: -Introductionmentioning

confidence: 99%

The Electrical Characteristic of Plasma Discharge by Using Different Operating Conditions in Vanadium Sputtering System

Roomy

Al-Gaffer

Khalaf³

2019

ANJS

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“…The latter process makes the breakdown a selfsustaining electric discharge. In 1889, Paschen presented a law stating that the breakdown voltage is dependent on the product of the gas pressure and the space between the two electrodes as V b = f (Pd) [9,10]. In 1915, Townsend introduced two quantities to explain the current growth through the gas discharge known as the first Townsend ionization coefficient () and second Townsend emission coefficient (γ) [11].…”

Section: Introductionmentioning

confidence: 99%

“…where A and B are constants depending on the gas properties [10]. The value of Pd at which the minimum breakdown voltage occurs is:…”

Section: Introductionmentioning

confidence: 99%

Minimum breakdown parameters through H2, He, N2 and Ar gases

Shager

El-Latif

Ebrahim

2019

Arab Journal of Nuclear Sciences and Applications

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A minimum breakdown voltage of the cylindrical coaxial virtual cathode oscillator is investigated using nitrogen (N 2), argon (Ar), helium (He) and hydrogen (H 2) gases through different anode transparencies. The study includes the effect of secondary electron emission on the minimum breakdown voltage, (V b) min , and the product, (Pd) min , of gas pressure, P, and inter-electrode distance, d. The changes in the minimum breakdown voltage with the gas pressure are studied where the pressure is the main factor of electric discharge. Paschen curve is studied through electric discharge for Ar and H 2 by using different anode transparencies.

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“…Low-pressure gas breakdown is a function of the product of the gas pressure, the electrode gap spacing and the electrode surface condition as well. 4,5 Especially for high voltage solar arrays, outgassing plays a critical role in arc inception, in which outgassing helps to generate the initial plasma near the metal-dielectric junctions, and it's also demonstrated that arcing rate decreases after fully outgassing. [6][7][8] The obvious worry associated with the local gas environment is the difficulty in determining exactly the electrical breakdown characteristics for the gas species.…”

Section: Introductionmentioning

confidence: 99%

High voltage breakdown induced by outgassing of space materials

et al. 2015

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Increasing demand for higher voltage and power levels aboard spacecrafts requires space vacuum as insulator. A concerned issue for this is whether the outgassing of dielectric materials profusely used in spacecrafts can induce breakdown, and what, if it occurs, the mechanism and characteristics are. In this paper, low pressure breakdown induced by outgassing was investigated experimentally. It’s found that vacuum breakdown is significantly facilitated by the outgassing of dielectric materials. Measurements of Paschen’s curves for typical outgassing samples show that significant decrease of breakdown voltage occurs in high vacuum region due to increase of local pressure from outgassed products. Another important mechanism that affects the breakdown voltage is the electrode surface contamination by the outgassed components. Primary models with these mechanisms taken into account are described and the model calculations agree well with the measurements. Both experimental findings and theoretical analysis indicate that outgassing of space materials is a potentially important threat to high voltage systems with vacuum as insulation.

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Inter‐Electrode Distance and Breakdown Voltage in Low Pressure Argon Discharges

Cited by 20 publications

References 29 publications

The Electrical Characteristic of Plasma Discharge by Using Different Operating Conditions in Vanadium Sputtering System

The Electrical Characteristic of Plasma Discharge by Using Different Operating Conditions in Vanadium Sputtering System

Minimum breakdown parameters through H2, He, N2 and Ar gases

High voltage breakdown induced by outgassing of space materials

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