Intercomparison of vacuum standards between the Physikalisch Technische Bundesanstalt (Germany) and the National Physical Laboratory (India) using two spinning rotor gauges

Sharma, J. K. N.; Mohan, Pardeep; Jitschin, W.; Röhl, P.

doi:10.1116/1.576179

Cited by 12 publications

(5 citation statements)

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“…Figure 2 is a schematic diagram of the NPLI Static Expansion Apparatus. This system has already been described [1,6,7], but is reproduced here to provide a ready reference. It consists essentially of two larger chambers of volumes ( 72 l) and ( 24 l) and three smaller chambers of volumes , , and .…”

Section: Static Expansion Apparatusmentioning

confidence: 99%

“…This system was used to participate in (i) an international comparison of vacuum standards organized by the BIPM in 1985 [8] and (ii) a bilateral comparison of vacuum standards between the Physikalisch-Technische Bundesanstalt (PTB), Germany, and the NPLI, using two spinning rotor gauges as the transfer devices [7]. Additionally, compatibility of the SEA with the OFS has been established in the overlapping pressure region [1].…”

Section: Static Expansion Apparatusmentioning

confidence: 99%

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Comparison of an ultrasonic interferometer manometer and a static expansion system using a capacitance diaphragm gauge

Mohan¹,

Sharma²,

Gupta³

1996

Metrologia

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The paper describes the results of a comparison of two primary low-pressure standards, (i) the Ultrasonic Interferometer Manometer (UIM) and (ii) the Static Expansion Apparatus (SEA), maintained at the National Physical Laboratory (NPLI), India. The comparison was carried out by employing a capacitance diaphragm gauge (CDG) of 1333 Pa full-scale range as the transfer standard over the pressure range 1 Pa to 1000 Pa. For pressures of 20 Pa and above, the values of the calibration factor of the CDG obtained on the SEA deviate 0,10 % from the values by the thermal transpiration equation and this deviation increases to over 0,4 % for pressures lower than 20 Pa. For the UIM, the deviation is found below 0,05 % at pressures of 100 Pa and above, but increases to 0,8 % for pressures as low as 1 Pa. The comparison (i) establishes the mutual compatibility of the two primary standards in the region of pressure overlap and (ii) sets limits to the uncertainty of measurements made on the two systems, which are 0,2 % at 1000 Pa and 1,0 % at 10-4 Pa for the SEA and 0,0014 % at 1000 Pa and 1,4 % at 1 Pa for the UIM.

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Section: Static Expansion Apparatusmentioning

confidence: 99%

Section: Static Expansion Apparatusmentioning

confidence: 99%

Comparison of an ultrasonic interferometer manometer and a static expansion system using a capacitance diaphragm gauge

Mohan¹,

Sharma²,

Gupta³

1996

Metrologia

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“…[6]. In 1989 and 2014, the international key comparisons were performed using two SRGs [7]. MKS has designed and developed the third generation SRG and named it SRG3 which is more robust and stable in high vacuum range.…”

Section: Introductionmentioning

confidence: 99%

Characterization of spinning rotor gauge-3 using orific flow system and static expansion system

Kumar¹,

Thakur²,

Kumar³

2020

ACTA IMEKO

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This article elucidates the calibration of newly procured spinning rotor gauge (SRG 3) from MKS Instruments, USA using primary vacuum standards: Orifice flow system (OFS) and Static expansion system (SES) established at National Physical Laboratory, India (NPLI) in the range of 10<sup>-4</sup> Pa to 1 Pa and further compared with manufacturer reported value which was calibrated by transfer standard of National Institute of Standards & Technology (NIST). The key parameters to calculate the pressure measured by SRG is the accommodation coefficients. The accommodation coefficients for N<sub>2</sub> gas obtained using OFS, SES, and calibration report form NIST USA (SRG2) are 0.957, 0.961, and 0.954 respectively.

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“…The larger volume is called the calibration chamber where the gauge under calibration is connected. NPLI, New Delhi has been maintaining a primary standard based on this principle for the last two decades [1][2][3][4]. In the past, the volume ratio was determined by using what in vacuum metrology is called "the method of successive expansion" employing two capacitance diaphragm gauges of appropriate ranges for the measurement of initial and final pressures [1].…”

Section: Introductionmentioning

confidence: 99%

Static expansion primary vacuum standard — Part 1: Determination of the volume ratio of the expansion stage

Mohan

Kumar

2009

MAPAN

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Measurement of volume ratio forms an essential part of the characterization of a static expansion system (SES) for the generation of pressures in the medium and high vacuum region. Because of the complexity of the vacuum chambers, it is not possible to determine the absolute volumes of the chambers involved. Hence an expansion process is resorted to, in which the gas enclosed in the small volume at a known pressure is allowed to expand, under isothermal conditions, into the large volume. The accuracy of the volume ratio thus determined depends on the stability of the vacuum gauges used for the measurement of initial and the final pressures and the ambient temperature. High accuracy resonant silicon gauges (RSGs) of two different ranges, one 130 kPa full scale and the other 1 kPa full scale for measurement of the initial and final pressures are found to be useful. This paper reports the results obtained with these RSGs for the measurement of the volume ratio of the National Physical Laboratory, India (NPLI) SES which is nominally 2820. With the use of the RSGs, and calibrated platinum resistance thermometers (PRTs) mounted inside the vacuum chambers, it has been possible to measure the volume ratio within the relative expanded uncertainty (k = 2) of 0.0014. The results of the volume ratio determination exercise are given in this paper while the Part 2 of this paper will discuss the procedure for the calibration of spinning rotor gauges on the Static expansion primary standard.

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Intercomparison of vacuum standards between the Physikalisch Technische Bundesanstalt (Germany) and the National Physical Laboratory (India) using two spinning rotor gauges

Cited by 12 publications

References 0 publications

Comparison of an ultrasonic interferometer manometer and a static expansion system using a capacitance diaphragm gauge

Comparison of an ultrasonic interferometer manometer and a static expansion system using a capacitance diaphragm gauge

Characterization of spinning rotor gauge-3 using orific flow system and static expansion system

Static expansion primary vacuum standard — Part 1: Determination of the volume ratio of the expansion stage

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