Interface characterization of B₄C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering

Abstract

B4C-based multilayers have important applications for soft to hard X-rays. In this paper, X-ray grazing-incidence reflectivity and diffuse scattering, combining various analysis methods, were used to characterize the structure of B4C-based multilayers including layer thickness, density, interfacial roughness, interdiffusion, correlation length, etc. Quantitative results for W/B4C, Mo/B4C and La/B4C multilayers were compared. W/B4C multilayers show the sharpest interfaces and most stable structures. The roughness replications of La/B4C and Mo/B4C multilayers are not strong, and oxidations and structure expansions are found in the aging process. This work provides guidance for future fabrication and characterization of B4C-based multilayers.

Studies on the stress and thermal properties of Mo/B4C and MoxC1-x/B4C multilayers

“…Reflectivity of 8% was obtained using W/B 4 C multilayer consisting of 50 bilayers at the 15°off normal incidence, while the measured reflectivity dropped 1% after 500°C annealing [15]. We have chosen the Mo/B 4 C multilayer bilayers in this study because B 4 C can form relatively smooth interfaces with Mo [16], and Mo/B 4 C has higher theoretical reflectivity compared to W/B 4 C multilayers within 6.6-7 nm wavelength range.…”

Design and Characterization of EUV and X-ray Multilayers

“…Aging effects related to the inherent characteristic of the materials deserve to be researched. Three B 4 C-based multilayers [66] were deposited by using magnetron sputtering including W/B 4 C, Mo/B 4 C and La/B 4 C multilayers. They were measured by using hard X-ray grazing incidence reflectivity while just prepared and after long-time storage in a dry atmosphere environment.…”