Interface Damage of Protective Layer in TEM Lamella Preparation for Highly Doped Ge Substrate

Rashid, Nur Nadhirah Mohamad; Junaidi, Norhamizah Hazirah Ahmad; Aid, Siti Rahmah

doi:10.1088/1757-899x/522/1/012003

Cited by 3 publications

(1 citation statement)

References 6 publications

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“…Then, a thicker metallic layer is deposited using the ionic beam (i-beam deposition). The e-beam deposition avoids surface degradation (and thus loss of thickness information on the topmost layer) due to direct impingement of the ionic beam on the surface [40]. The full workflow for the preparation of a cross-section using a FIB is visible in Figure 2.…”

Section: Ion Beam Cross-sectioningmentioning

confidence: 99%

Measuring the Thickness of Metal Films: A Selection Guide to the Most Suitable Technique

Giurlani

Berretti

Lavacchi

et al. 2020

2nd Coatings and Interfaces Web Conference (CIWC-2 2020)

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The determination of thickness has a fundamental importance in all fields in which the implementation of films and coatings are required and takes a crucial role in the electroplating sector. The thickness influences many aspects of the coatings such as electrical, mechanical, corrosion protection, and even aesthetic properties. In the multitude of applications of thin layer coatings, the variability of thicknesses and materials is very high, as well as the variability of possible techniques that can be used to determine the characteristics of the layers of interest. The first distinction that can be made between these techniques is that which divides destructive techniques from non-destructive ones, in which, however, the semi- or micro-destructive techniques are immediately difficult to place. Other important parameters to consider are the cost, both for the purchase of the instrumentation and for each single analysis, the difficulties in preparing and measuring the sample, data processing, and obviously the detectable thickness ranges, the possible measurable materials, and precision and accuracy. The purpose of this work is to compare the characteristics of the various investigation methods, with a particular focus on metal film applications, so that it will be easier to choose the most suitable technique for each purpose.

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Section: Ion Beam Cross-sectioningmentioning

confidence: 99%

Measuring the Thickness of Metal Films: A Selection Guide to the Most Suitable Technique

Giurlani

Berretti

Lavacchi

et al. 2020

2nd Coatings and Interfaces Web Conference (CIWC-2 2020)

View full text Add to dashboard Cite

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Inline Characterization of Ultrathin Amorphous Silicon Stacks in Silicon Heterojunction Solar Cell Precursors With Differential Reflectance Spectroscopy

Kumar

Vahlman

Al-Hajjawi

et al. 2023

IEEE J. Photovoltaics

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Measuring the Thickness of Metal Coatings: A Review of the Methods

et al. 2020

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Thickness dramatically affects the functionality of coatings. Accordingly, the techniques in use to determine the thickness are of utmost importance for coatings research and technology. In this review, we analyse some of the most appropriate methods for determining the thickness of metallic coatings. In doing so, we classify the techniques into two categories: (i) destructive and (ii) non-destructive. We report on the peculiarity and accuracy of each of these methods with a focus on the pros and cons. The manuscript also covers practical issues, such as the complexity of the procedure and the time required to obtain results. While the analysis focuses most on metal coatings, many methods are also applicable to films of other materials.

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Interface Damage of Protective Layer in TEM Lamella Preparation for Highly Doped Ge Substrate

Cited by 3 publications

References 6 publications

Measuring the Thickness of Metal Films: A Selection Guide to the Most Suitable Technique

Measuring the Thickness of Metal Films: A Selection Guide to the Most Suitable Technique

Inline Characterization of Ultrathin Amorphous Silicon Stacks in Silicon Heterojunction Solar Cell Precursors With Differential Reflectance Spectroscopy

Measuring the Thickness of Metal Coatings: A Review of the Methods

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