Tungsten (W) film was deposited on bulk single crystalline 6H-SiC substrate and annealed in H 2 ambient at temperatures of 700 ºC, 800 ºC and 1000 ºC for 1 hour. The resulting solidstate reactions, phase composition and surface morphology were investigated by Rutherford backscattering spectrometry (RBS), grazing incidence X-ray diffraction (GIXRD) and scanning electron microscopy (SEM) analysis techniques. These results are compared with the vacuum annealed results reported in our earlier work. As-deposited RBS results indicated the presence of W and O 2 in the deposited thin film, the GIXRD showed the presence of W, The SEM micrographs of the as-deposited samples indicated the W thin film had a uniform surface with small grains. Annealing at 800 ºC led to the agglomeration of W grains into clusters making the surface rough.