Interferometric ellipsometry

Hazebroek, H F; Holscher, A A

doi:10.1088/0022-3735/6/9/013

Cited by 63 publications

(21 citation statements)

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“…1 It consists in using a frequency stabilized laser with a Michelson interferometer. The light source, a He-Ne laser, emits a beam of monochromatic unpolarized light of wavelength 632.9 nm.…”

Section: A the Hazebroek And Holscher Ellipsometermentioning

confidence: 99%

A new type of fiber-optic-based interferometric ellipsometer for in situ and real-time measurements

Topçu

Chassagne

Alayli

2003

Review of Scientific Instruments

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To cite this version:Suat Topsu, Luc Chassagne, Yasser Alayli. A new type of fiber-optic-based interferometric ellipsometer for in situ and real-time measurements. Review of Scientific Instruments, American Institute of Physics, 2003, 74 (10) It is shown that it is possible to improve interferometric ellipsometers by using a Pockels cell or a Bragg cell hence avoiding the use of any moving components. Furthermore, these methods allow one to increase the beat frequency signal permitting a better insensitiveness to mechanical disturbances. It is also shown how to incorporate an optical fiber between the neutral beam splitter and the sample without losing any information concerning the ellipsometric angles of the sample. Several configurations are described and theoretically analyzed. The last ones do not contain any active component around the sample. They offer a new measurement technique for real-time and in situ measurements.

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Section: A the Hazebroek And Holscher Ellipsometermentioning

confidence: 99%

A new type of fiber-optic-based interferometric ellipsometer for in situ and real-time measurements

Topçu

Chassagne

Alayli

2003

Review of Scientific Instruments

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“…Research in interferometric ellipsometry began in the early 1970's (Dmitriev 1972, Hazebroek et. al.…”

Section: Pvmentioning

confidence: 99%

“…By the early 1970's, it had been successfully employed in the study of adsorbed films of thicknesses as small as fractional mono-layers and with an experimental accuracy within +/-lA (Hazebroek H H, Holscher A A 1973).…”

Section: Review Of Interferometric Ellipsometrymentioning

confidence: 99%

“…Hazebroek and Holscher (Hazebroek et al 1973(Hazebroek et al , 1983) developed an interferometric eliipsometer based on a Michelson interferometer arrangement. Figure 13 illustrates the layout of the instrument.…”

Section: Hazebroek and Holscherinterferometric Ellipsometermentioning

confidence: 99%

“…The authors (Hazebroek et al 1973(Hazebroek et al , 1983 claim many advantages of the system including that no compensator is required, absolute measurements are possible, and the polarization ellipse is directly observable on an oscilloscope. Only one other component needs repositioning to perform multiple angle of incidence ellipsometry.…”

Section: Hazebroek and Holscherinterferometric Ellipsometermentioning

confidence: 99%

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Phase-shifting interferometric imaging ellipsometer

Wells

Wyant

1997

Polarization: Measurement, Analysis, and Remote Sensing

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This manuscript has been reproduced from the microfilm master. UMI films the text directly from the original or copy submitted. Thus, some thesis and dissertation copies are in typewriter face, while others may be from any type of computer printer.The quality of this reproduction is dependent upon the quality of the copy submitted. Broken or indistinct print, colored or poor quality illustrations and photographs, print bleedthrough, substandard margins, and improper alignment can adversely affect reproduction.In the unlikely event that the author did not send UMI a complete manuscript and there are missing pages, these will be noted. Also, if unauthorized copyright material had to be removed, a note will indicate the deletion.Oversize materials (e.g., maps, drawings, charts) are reproduced by sectioning the original, beginning at the upper left-hand comer and continuing from left to right in equal sections with small overiaps. Each original is also photographed in one exposure and is included in reduced form at the back of the book.Photographs included in the original manuscript have been reproduced xerographically in this copy. Higher quality 6" x 9" black and white photographic prints are available for any photographs or illustrations appearing in this copy for an additional charge. Contact UMI directly to order. STATEMENT BY AUTHORThis dissertation has been submitted in partial fulfillment of requirements for an advanced degree at the University of Arizona and is deposited in the university library to be made available to borrowers under rules of the Library.Brief quotations from this dissertation are allowable without special permission, provided that accurate acknowledgement of the source is made. Requests for permission for extended quotation firom or reproduction of this manuscript in whole or in part may be granted by the head of the major department or the dean of the graduate college when in his or her judgement the proposed use of the material is in the interests of scholarship. In all other instances, however, permission must be granted firom the author Table 5 Results of repeatability measurements for silicon substrate A 126 Table 6 Results of repeatability measurements for 126nm Si02 coating A 126 Table 7 Results of repeatability measurements for ratio of reflectance measurement 128 ABSTRACTA novel imaging ellipsometer has been developed; the phase shifting interferometric imaging ellipsometer (PSIIE) is the first ellipsometer to use phase-shifting interferometry for data acquisition. The only moving part in the system is a solid state PZT. The PSIIE uses a polarization interferometer, followed by a Wollaston prism, to obtain simultaneously, samples of the S and P polarization component interferograms.Interferogram phase yields the ellipsometric parameter, A, while the fringe modulation yields the tangent of the ellipsometric parameter 4^. The instrument can perform multiple wavelength and multiple angle-of-incidence ellipsometry over the entire visible range with the addition of a tunable las...

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Ellipsometers

Collins

Vedam

2003

Digital Encyclopedia of Applied Physics

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Interferometric ellipsometry

Cited by 63 publications

References 4 publications

A new type of fiber-optic-based interferometric ellipsometer for in situ and real-time measurements

A new type of fiber-optic-based interferometric ellipsometer for in situ and real-time measurements

Phase-shifting interferometric imaging ellipsometer

Ellipsometers

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