This manuscript has been reproduced from the microfiim master. UMI films the text directly from the original or copy submitted. Thus, some thesis arKi dissertation copies are in typewriter face, while others may t)e from any type of computer printer.The quality of this reproduction is dependent upon the quality of the copy submitted. Broken or indistinct print, colored or poor quality illustrations and photographs, print bleedthrough, substandard margins, and improper alignment can adversely aftoct reproduction.In the unlikely event that the author dkj not send UMI a complete manuscript and there are missing pages, these will be noted. Also, if unauthorized copyright material had to be removed, a rx>te will indicate the deletk>n.Oversize materials (e.g., maps, drawings, charts) are reproduced by sectioning the original, t)eginning at the upper left-hand comer and continuing from left to right in equal sections with small overlaps.Photographs included in the original manuscript have been reproduced xerographically in this copy. Higher quality 6' x 9" black and white photographic prints are availat)le for any photographs or illustrations appearing in this copy for an additkxial charge. Contact UMI directly to order. I was fortunate to be chosen by TRDI, Japan Defense Agency, to pursue graduate study and research at the Optical Science Center (OSC) at the University of Arizona (UA). I would like to thank them for giving me the chance to conduct graduate research here at OSC.Of course, I am grateful to my husband, who is conducting his own Ph.D research at the University of Iowa, and my parents for their patience and love. Without them this work would never have come into existence.Finally, I wish to thank my former roommate, Ying, who left two kittens, DaBao and SanBao when she moved to South Carolina. The kittens have been great compan ions along with the huge mess they create every day. I will miss the kittens terribly when I go back to Japan. Wavelet transform analysis of a correlogram 54 FIGURE 2.8. Surface profiles obtained from various vertical scanning algorithms. 59 FIGURE 2.9. Number of operations required for each algorithm 62 FIGURE 2.10. Simulated correlograms of 90° scanning step with 0-10% Gaussian distribution random noise of maximum contrast 65 FIGURE 2.11. Simulated correlograms of 270° scanning step with 0-10% Gaus sian distribution random noise of maximum contrast 66 11LIST OF FIGURES-Continued FIGURE 2.12. Surface profile obtained from simulated correlograms with 6% Gaussian distribution random noise of maximum contrast 67 FIGURE 2.13. Simulated correlograms with 10% periodic motor noise 70 FIGURE 2.14. Surface profile obteiined from simulated correlograms with 10% periodic motor noise 71 The work proceeds with a discussion of the phase change upon reflection and its influence on the coherence envelope. Then phase meeisurement interferometry methods are reviewed. The emphasis is in errors in phase measurement resulting from using a white light source instead of a monochromatic light source ...

This paper describes a technique that combines ideas of phase shifting interferometry (PSI) and two-wavelength interferometry (TWLI) to extend the phase measurement range of conventional single-wavelength PSI. To verify theoretical predictions, experiments have been performed using a solid-state linear detector array to measure 1-D surface heights. Problems associated with TWLPSI and the experimental setup are discussed. To test the capability of the TWLPSI, a very fine fringe pattern was used to illuminate a 1024 element detector array. Without temporal averaging, the repeatability of measuring a surface having a sag of-100 Am is better than 25-A (0.0025%) rms.