Interferometric multiwavelength system for long gauge blocks measurements

Wengierow, Michal; Sałbut, Leszek; Ramotowski, Zbigniew

doi:10.1117/12.889785

Cited by 4 publications

(2 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It can be done by using one of the automatic fringe pattern analysis methods. The eight-point phase shifting algorithm with approximation of the Hanning window [21][22] which minimizes the phase error caused by phase-shift miscalibration has been proposed. The exemplary phase map modulo 2π with marked areas for further analysis of phase fraction is presented in Fig.…”

Section: Image Analysis and Length Determination Methodsmentioning

confidence: 99%

Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Wengierow¹,

Sałbut²,

Ramotowski³

et al. 2013

Metrology and Measurement Systems

Self Cite

View full text Add to dashboard Cite

This paper shows the result of work of the Institute of Micromechanics and Photonics at Warsaw University of Technology and the Length and Angle Division of Central Office of Measures (GUM) [1] in building an automatic multiwavelength interferometric system with extended measurement range for calibration of long (up to 1 m) gauge blocks. The design of a full working setup with environmental condition control and monitoring systems, as well as image analysis software, is presented. For length deviation determination the phase fraction approach is proposed and described. To confirm that the system is capable of calibrating gauge blocks with assumed accuracy, a comparison between the results of 300 mm length gauge block measurement obtained by using other systems from the Central Office of Measures is made. Statistical analysis proved that the system can be used for high precision measurements with assumed standard uncertainty (125 nm for a length of 1 m). Finally the comparison between our results obtained for a long gauge block set (600 mm to 1000 mm long) and previous calibrations made by the Physikalisch-Technische Bundesanstalt (PTB) [2] is shown.

show abstract

Section: Image Analysis and Length Determination Methodsmentioning

confidence: 99%

Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Wengierow¹,

Sałbut²,

Ramotowski³

et al. 2013

Metrology and Measurement Systems

Self Cite

View full text Add to dashboard Cite

show abstract

“…Uncertainty evaluation for the measurement of GBs by popular optical laser measurement method is estimated [3,4]. Multiwavelength interferometer using pattern analysis method based on fringe fraction method has been referenced [5]. While there are different measuring techniques that can be used for surface characterization in microand nanoscale [6].…”

Section: Introductionmentioning

confidence: 99%

Uncertainty Estimation due to Geometrical Imperfection and Wringing in Calibration of End Standards

Ali

Naeim

2013

ISRN Optics

View full text Add to dashboard Cite

Uncertainty in gauge block measurement depends on three major areas, thermal effects, dimension metrology system that includes measurement strategy, and end standard surface perfection grades. In this paper, we focus precisely on estimating the uncertainty due to the geometrical imperfection of measuring surfaces and wringing gab in calibration of end standards grade 0. Optomechanical system equipped with Zygo measurement interferometer (ZMI-1000A) and AFM technique have been employed. A novel protocol of measurement covering the geometric form of end standard surfaces and wrung base platen was experimentally applied. Surface imperfection characteristics of commonly used 6.5 mm GB have been achieved by AFM in 2D and 3D to be applied in three sets of experiments. The results show that there are obvious mapping relations between the geometrical imperfection and wringing thickness of the end standards calibration. Moreover, the predicted uncertainties are clearly estimated within an acceptable range from 0.132 µm, 0.164 µm and 0.202 µm, respectively. Experimental and analytical results are also presented.

show abstract

Surface imperfection and wringing thickness in uncertainty estimation of end standards calibration

Ali

Naeim

2014

Optics and Lasers in Engineering

View full text Add to dashboard Cite

Interferometric multiwavelength system for long gauge blocks measurements

Cited by 4 publications

References 0 publications

Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Uncertainty Estimation due to Geometrical Imperfection and Wringing in Calibration of End Standards

Surface imperfection and wringing thickness in uncertainty estimation of end standards calibration

Contact Info

Product

Resources

About