Interferometry at the PTB Nanometer Comparator: design, status and development

Flügge, Jens; Weichert, Christoph; Hu, Hai Feng; Köning, Rainer; Bosse, Harald; Wiegmann, Axel; Schulz, Michael; Elster, Clemens; Geckeler, Ralf D.

doi:10.1117/12.821252

Cited by 12 publications

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“…Another method is the line scale measurement. Since the turn of the century, very high precision calibration systems for line scales and linear encoders have been developed by several laboratories [7][8][9][10]. Interlaboratory comparisons of line standards have also been conducted to verify the reliability of measurement [11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Long-term dimensional stability and longitudinal uniformity of line scales made of glass ceramics

Takahashi¹

2010

Meas. Sci. Technol.

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Line scales are commonly used as a working standard of length for the calibration of optical measuring instruments such as profile projectors, measuring microscopes and video measuring systems. For high-precision calibration, line scales with low thermal expansion are commonly used. Glass ceramics have a very low coefficient of thermal expansion (CTE) and are widely used for precision line scales. From a previous study, it is known that glass ceramics decrease in length from the time of production or heat treatment. The line scale measurement method can evaluate more than one section of the line scale and is capable of the evaluation of the longitudinal uniformity of the secular change of glass ceramics. In this paper, an arithmetic model of the secular change of a line scale and its longitudinal uniformity is proposed. Six line scales made of Zerodur®, Clearceram® and synthetic quartz were manufactured at the same time. The dimensional changes of the six line scales were experimentally evaluated over 2 years using a line scale calibration system.

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Section: Introductionmentioning

confidence: 99%

Long-term dimensional stability and longitudinal uniformity of line scales made of glass ceramics

Takahashi¹

2010

Meas. Sci. Technol.

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“…This groove defined the general moving direction of the slide (x-direction). The relative motion of the sample carriage to the bridge of the NMC was measured by three interferometers operating under vacuum conditions (x, yaw and pitch) [29] and three y-interferometers [7] operating in air. The position of the sample carriage in the x-direction was controlled based on the feedback of the x-interferometer and exhibited a standard deviation of less than 0.2 nm over the whole moving range of 600 mm [30].…”

Section: Straightness Measurements Using the Tms Methodsmentioning

confidence: 99%

“…The y-interferometers exhibited a dead-path below 1 mm, minimal periodic nonlinearities and a measurement distance below 10 µm, which resulted in uncertainties in the subnanometre range (u Y1 = 0.23 nm, u Y2 = 0.10 nm, u Y3 = 0.03 nm). Besides the y-interferometers, the measurement values of the homodyne yaw angle interferometer [29] are needed for the TMS method. The homodyne yaw interferometer resolved yaw angle variations with a resolution of 3 nrad, but exhibited a position-dependent error with a slope in the range of ±780 nrad m −1 [35].…”

Section: Straightness Measurements Using the Tms Methodsmentioning

confidence: 99%

“…It is used for the calibration of line scales [25], encoder systems [26] and photomasks [27] to disseminate the unit of length to industry. A deeper insight into the setup is presented in [25][26][27][28][29][30]. In this contribution, only the components essential for the straightness measurements are addressed.…”

Section: Straightness Measurement With the Nanometer Comparatormentioning

confidence: 99%

“…Figure 2. Schematic drawing of the Nanometer Comparator: 1: vacuum chamber for the x-, yaw-and pitch-interferometers; 2:x-interferometer beam splitter[29]; 3: vacuum bellow connecting the moving slide and the vacuum chamber guiding the measurement beams; 4: pipes for the reference beams of the interferometers; 5: bridge with all reference mirrors; 6: sample carriage with long-range y-mirror and moving mirrors of the vacuum interferometers[28]; 7: moving slide; 8 + 9: voice coil and linear motor for the positioning of the slide; 10: granite base (size: 3.15 × 0.8 × 0.7 m 3 ); 11: active vibration isolation; 12: piezo elements connecting the air bearings and the slide; 13: straightness reflector mounted on the bridge; 14: straightness interferometer (interferometer head and splitting element) mounted on the sample carriage.…”

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confidence: 99%

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Investigation into the limitations of straightness interferometers using a multisensor-based error separation method

Weichert

Köchert

Schötka

et al. 2018

Meas. Sci. Technol.

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The uncertainty of a straightness interferometer is independent of the component used to introduce the divergence angle between the two probing beams, and is limited by three main error sources, which are linked to each other: their resolution, the influence of refractive index gradients and the topography of the straightness reflector. To identify the configuration with minimal uncertainties under laboratory conditions, a fully fibre-coupled heterodyne interferometer was successively equipped with three different wedge prisms, resulting in three different divergence angles (4°, 8° and 20°). To separate the error sources an independent reference with a smaller reproducibility is needed. Therefore, the straightness measurement capability of the Nanometer Comparator, based on a multisensor error separation method, was improved to provide measurements with a reproducibility of 0.2 nm. The comparison results revealed that the influence of the refractive index gradients of air did not increase with interspaces between the probing beams of more than 11.3 mm. Therefore, over a movement range of 220 mm, the lowest uncertainty was achieved with the largest divergence angle. The dominant uncertainty contribution arose from the mirror topography, which was additionally determined with a Fizeau interferometer. The measured topography agreed within ±1.3 nm with the systematic deviations revealed in the straightness comparison, resulting in an uncertainty contribution of 2.6 nm for the straightness interferometer.

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Aspects of design and the characterization of a high resolution heterodyne displacement interferometer

et al. 2009

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Interferometry at the PTB Nanometer Comparator: design, status and development

Cited by 12 publications

References 0 publications

Long-term dimensional stability and longitudinal uniformity of line scales made of glass ceramics

Long-term dimensional stability and longitudinal uniformity of line scales made of glass ceramics

Investigation into the limitations of straightness interferometers using a multisensor-based error separation method

Aspects of design and the characterization of a high resolution heterodyne displacement interferometer

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