2022
DOI: 10.1007/s40544-022-0613-x
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Intermittent failure mechanism and stabilization of microscale electrical contact

Abstract: The stability and lifetime of electrical contact pose a major challenge to the performance of microelectro-mechanical systems (MEMS), such as MEMS switches. The microscopic failure mechanism of electrical contact still remains largely unclear. Here conductive atomic force microscopy with hot switching mode was adopted to simulate the asperity-level contact condition in a MEMS switch. Strong variation and fluctuation of current and adhesion force were observed during 10,000 repetitive cycles, exhibiting an “int… Show more

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Cited by 9 publications
(3 citation statements)
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“…This parameter plays a pivotal role in various MEMS applications, influencing the reliability and precision of the device operation. Engineers meticulously optimize the release voltage by considering factors such as electrode geometry, distance between electrodes, and material properties [45,46]. Striking the right balance in the release voltage is essential to avoid issues like excessive power consumption, potential damage, or incomplete release, ensuring the optimal performance and longevity of electrostatic MEMS devices.…”
Section: Actuation Voltagementioning
confidence: 99%
“…This parameter plays a pivotal role in various MEMS applications, influencing the reliability and precision of the device operation. Engineers meticulously optimize the release voltage by considering factors such as electrode geometry, distance between electrodes, and material properties [45,46]. Striking the right balance in the release voltage is essential to avoid issues like excessive power consumption, potential damage, or incomplete release, ensuring the optimal performance and longevity of electrostatic MEMS devices.…”
Section: Actuation Voltagementioning
confidence: 99%
“…On one aspect, the capillary force yields unfavorable consequences. The adhesion prompted by capillary phenomenon introduces friction predicament at the interfaces of micro-devices, which has emerged as a pivotal contributor to the malfunction of MEMS devices 10,11 . On the other hand, capillary force can be applied to micro grasping to realize fine operations such as nanoassembling and nano-processing [12][13][14] .…”
Section: Introductionmentioning
confidence: 99%
“…Many studies have been conducted to investigate the problem of electrical contact wear. [1][2][3][4][5] Electrical contact wear is a complex process involving several physical changes and chemical reaction interaction including friction, temperature rises, mechanical wear, and oxidation. Azevedo et al 6 performed experimental research on the wear behaviors of electric contact friction and established the relationship between material loss and peeling of the hard phase produced by the oxidation of the friction pair surface.…”
Section: Introductionmentioning
confidence: 99%