2004
DOI: 10.1021/cm040054y
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Intermolecular Interactions between a Monomolecular Hydroxyl-Terminated Perfluoropolyether Film and the Sputtered SiNx Surface

Abstract: The intermolecular interactions at the interface between a monomolecular hydroxyl-terminated perfluoropolyether (PFPE) liquid and an amorphous silicon nitride (SiNx) film were investigated using contact angle goniometry, Fourier transform infrared spectroscopy, and X-ray photoelectron spectroscopy. The results demonstrate that the surface of the sputtered SiNx film is highly oxidized (SiO2) and contain hydroxyl groups (SiOH) that are capable of attractive interactions with the hydroxyl end groups of the PFPE. … Show more

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Cited by 3 publications
(5 citation statements)
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“…Our solid-state nanopore device is depicted in Figure (left panel). The SiN membrane surface contains a native oxide layer, which is used here for monolayer self-assembly of organosilanes . Prior to coating, we find that piranha treatment is crucial for removal of contaminants and surface activation.…”
mentioning
confidence: 99%
“…Our solid-state nanopore device is depicted in Figure (left panel). The SiN membrane surface contains a native oxide layer, which is used here for monolayer self-assembly of organosilanes . Prior to coating, we find that piranha treatment is crucial for removal of contaminants and surface activation.…”
mentioning
confidence: 99%
“…The details of the bonding interactions between the PFPE hydroxyl end group and the SiN x surface is finally summarized via dimer interactions using ab initio quantum chemistry. Again for the purposes of this discussion, the sputtered SiN x surface polar group is assumed to be the silanol functionality (SiOH) based upon previous work [9]. The salient features of the Hbonding interactions are summarized in figure 13 and table 3.…”
Section: Discussionmentioning
confidence: 99%
“…For the film thicknesses utilized in these studies, nominally 25 Å , the stoichiometry of the sputtered SiN x film was determined to be Si 3.0 N 3.0 O 1.6 with significant SiO 2 and surface SiOH groups on the basis of XPS and FTIR analyses, respectively [9]. The functional moiety on the sputtered SiN x surface that is reactive to the PFPE hydroxyl groups is presently considered to derive primarily from the SiOH group based upon the following previous findings: (1) the SiOH functional moiety was detected via FTIR; (2) ESCA showed approximately 30% SiO 2 in sputtered SiN x ; and (3) theoretical studies showed the Si 3 N nitrogen lone pair of electrons was unavailable for chemistry due to Si-N d(p)-p(p) interactions [9]. Throughout the text we will frequently refer to the SiN x film as ''sputtered SiN x '' to distinguish it from stoichiometric Si 3 N 4 .…”
Section: Methodsmentioning
confidence: 99%
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