Internal resonance in coupled oscillators – Part II: A synchronous sensing scheme for both mass perturbation and driving force with duffing nonlinearity

Xia, Cao; Wang, Dong F.; Ono, Takahito; Itoh, Toshihiro; Esashi, Masayoshi

doi:10.1016/j.ymssp.2021.107887

Cited by 18 publications

(2 citation statements)

References 41 publications

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“…Micromechanical system resonators have been utilized as key components in many products, involving various sensors utilizing resonance frequency shift to measure external acceleration or mass [1][2][3][4][5][6]. It is well known that there are abundant nonlinear phenomena [7][8][9] in MEMS while enlarging the driving voltages in the nonlinear region [10,11]. Actually, the large excitation will significantly increase the vibration amplitude, and thus, improving the performance of such devices [12,13].…”

Section: Introductionmentioning

confidence: 99%

Nonlinearity modulation in a mode-localized mass sensor based on electrostatically coupled resonators under primary and superharmonic resonances

Lyu

Zhao²,

Kacem

et al. 2023

Phys. Scr.

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A general model of a mode-localized mass sensor incorporating two weakly coupled clamped-clamped microbeams under electrostatic excitation is presented, and a reduced-order model considering quadratic and cubic nonlinearities is established. The multiple time scales method is used to solve the dynamic characteristics of the coupled resonators under primary resonance, simultaneous superharmonic and primary excitations, and one-third superharmonic resonance respectively, and to analyze the contribution of each harmonic excitation term. It is shown that the sensor can display softening, hardening, and linear behaviors by tuning the overall nonlinear coefficient in three different excitation scenarios.Furthermore, the conditions for restoring linear behavior with the highest possible amplitude without any hysteresis under different excitations are obtained. Finally, the mass sensitivities represented by the relative shift of amplitude ratio are calculated for all the resulting dynamic behaviors. The results show that the sensitivity is highest, for the hardening behavior in the in-phase mode and for the softening behavior in the out-of-phase mode. Interestingly, the sensitivities of the linear behavior obtained by nonlinearity modulation are the same for the two vibration modes, which is improve the output stability. Consequently, the sensor resolution can be significantly enhanced below the pull-in instability, while avoiding noise mixing.

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Section: Introductionmentioning

confidence: 99%

Nonlinearity modulation in a mode-localized mass sensor based on electrostatically coupled resonators under primary and superharmonic resonances

Lyu

Zhao²,

Kacem

et al. 2023

Phys. Scr.

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show abstract

“…Due to the interaction between the geometry nonlinearity (mid-plane stretching) and the force nonlinearity, the curved structure exhibits multiple stable equilibria, snap-through motion and pull-in instabilities along with modal interaction [ 18 , 19 , 20 , 21 , 22 ]. It is well acknowledged that there are abundant nonlinear phenomena in MEMS while extending the micro-devices driving forces into the nonlinear regimes [ 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 ]. Essentially, a large excitation will significantly increase the vibration amplitude and thus improve the performance of such devices [ 32 , 33 , 34 ].…”

Section: Introductionmentioning

confidence: 99%

Investigation into Mode Localization of Electrostatically Coupled Shallow Microbeams for Potential Sensing Applications

Alneamy

Ouakad

2022

Micromachines

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With the constant need for the development of smart devices, Micro-Electro-Mechanical Systems (MEMS) based smart sensors have been developed to detect hazard materials, micro-particles or even toxic substances. Identifying small particles using such micro-engineering technology requires designing sensors with high sensitivity, selectivity and ease of integration with other electronic components. Nevertheless, the available detection mechanism designs are still juvenile and need more innovative ideas to be even more competitive. Therefore, this work aims to introduce a novel, smart and innovative micro-sensor design consisting of two weakly electrostatically coupled microbeams (both serving as sensors) and electrically excited using a stationary electrode assuming a dc/ac electric signal. The sensor design can be tuned from straight to eventually initially curved microbeams. Such an arrangement would develop certain nonlinear phenomena, such as the snap-through motion. This behavior would portray certain mode veering/mode crossing and ultimately mode localization and it would certainly lead in increasing the sensitivity of the mode-localized based sensing mechanism. These can be achieved by tracking the change in the resonance frequencies of the two microbeams as the coupling control parameter is varied. To this extent, a nonlinear model of the design is presented, and then a reduced-order model considering all geometric and electrical nonlinearities is established. A Long-Time Integration (LTI) method is utilized to solve the static and dynamics of the coupled resonators under primary lower-order and higher-order resonances, respectively. It is shown that the system can display veering and mode coupling in the vicinity of the primary resonances of both beams. Such detected modal interactions lead to an increase in the sensitivity of the sensor design. In addition, the use of two different beam’s configurations in one device uncovered a possibility of using this design in detecting two potential substances at the same time using the two interacting resonant peaks.

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Magnetically coupled oscillators applicable to high-sensitivity mass detection

et al. 2022

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Internal resonance in coupled oscillators – Part II: A synchronous sensing scheme for both mass perturbation and driving force with duffing nonlinearity

Cited by 18 publications

References 41 publications

Nonlinearity modulation in a mode-localized mass sensor based on electrostatically coupled resonators under primary and superharmonic resonances

Nonlinearity modulation in a mode-localized mass sensor based on electrostatically coupled resonators under primary and superharmonic resonances

Investigation into Mode Localization of Electrostatically Coupled Shallow Microbeams for Potential Sensing Applications

Magnetically coupled oscillators applicable to high-sensitivity mass detection

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