Interpretation of Field Measurements in the Cathode Region of Glow Discharges

Warren, R.W.

doi:10.1103/physrev.98.1658

Cited by 44 publications

(14 citation statements)

References 23 publications

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“…2 ͑fat solid line͒. For high sheath voltages (ӷ1) and strongly collisional conditions (xӷ1/) the solution tends ͑slowly͒ to Warren's law 14,15 generalizing Eqs. ͑24͒ and ͑25͒ for arbitrary collisionality.…”

Section: Collisions In the Sheathmentioning

confidence: 80%

Unipolar ion sheath

Riemann

Tsendin

2001

Journal of Applied Physics

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In technical applications, the ion sheath in front of a highly negative wall is frequently described by the well known Child-Langmuir law. Due to inaccurate boundary conditions, however, this yields only a rather poor approximation. The collisionless Child-Langmuir law can be substantially improved by accounting for universal initial conditions following from the Bohm criterion. By a simple analytical ansatz the resulting unipolar ion sheath law is generalized to account for ͑charge exchange͒ ion collisions in the sheath.

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Section: Collisions In the Sheathmentioning

confidence: 80%

Unipolar ion sheath

Riemann

Tsendin

2001

Journal of Applied Physics

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“…On the basis of the work developed by Child 18 for a "free fall" model in the case of a negatively biased plane electrode and using the improvements of this theory in the case of collision conditions proposed by Warren, 19 we have developed an analytical model describing the ion flux incoming on the cylindrical probe. In this model, the positive ions are drifted toward the cylindrical probe with a velocity governed by a mobility law.…”

Section: A Analytical Methods Taking Into Account the Sheath Expansiomentioning

confidence: 99%

Determination of the electron density in plasma by means of a floating double probe

Jauberteau

2008

Review of Scientific Instruments

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Investigations are performed in a microwave plasma expansion containing argon-nitrogen gas mixture. The purpose of this work is to measure accurate electron density values by means of a floating double probe. We check the accuracy of the different methods developed for the double probe under different experimental conditions in Ar-N2 gas mixture, comparing results to single probe measurements. On the basis of previous works, we propose a simple way to determine the electron density without the knowledge of the plasma potential.

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“…In a previous work, Warren 14 considered that the average velocity of positive ions in gases is determined by collisions with gas molecules, and for field to pressure ratio greater than about 100 V/Torr ͑it is typically larger than 1000 in the sheath of our experiments͒, the velocity is given by k͑E / P͒ 1/2 , where k is the mobility specific to each gas.…”

Section: B the Drop Voltage Through The Sheath: Relation Between V Pmentioning

confidence: 99%

Effect of the electron energy distribution function in plasma on the Bohm criterion and on the drop voltage through the sheath: Case of microwave expanding plasma

Jauberteau

2009

Journal of Applied Physics

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This work is devoted to the study of the sheath expansion above a charged species collector immersed into the plasma in the general case of the electron energy distribution function ͑EEDF͒ ͑not necessarily a Boltzmann distributed function͒. In the first part, considering the general form of the electron kinetic energy distribution function ͑EEDF͒ in the plasma and assuming a one dimensional system, we propose an equation describing the limit value of the ion velocity at the sheath edge. Then, we extend this equation to the three dimensional problem. These results are discussed assuming Boltzmann distribution for the one dimensional system and Maxwell-Boltzmann distribution in the case of the three dimensional system. Both one and two temperature distributions are considered. Then, the method is applied to experimental results obtained in expanding microwave discharge sustained in argon. In the second part, we study the drop voltage through the sheath that is produced around a cylindrical collector biased at the floating potential. A theoretical model is given, and results are compared with experimental values measured by means of a cylindrical Langmuir probe immersed in microwave expanding plasma. The model agrees with experiments and points out the role of the EEDF profile on the ion velocity at the sheath edge and, consequently, on the drop voltage through the sheath.

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Interpretation of Field Measurements in the Cathode Region of Glow Discharges

Cited by 44 publications

References 23 publications

Unipolar ion sheath

Unipolar ion sheath

Determination of the electron density in plasma by means of a floating double probe

Effect of the electron energy distribution function in plasma on the Bohm criterion and on the drop voltage through the sheath: Case of microwave expanding plasma

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