2012
DOI: 10.1109/tcst.2011.2116789
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Interval Modeling and Robust Control of Piezoelectric Microactuators

Abstract: Abstract-Microsystems are very sensitive to environmental disturbances (thermal variation, surrounding vibration, microobjects in contact with them, etc.) and they are often subjected to small degradation or their behaviors are often affected during the functioning. As a result, their parameters often change during the micromanipulation, microassembly or measurement tasks and the accuracy or even the stability may be lost. For that, robust control laws should be introduced to control them and to ensure the per… Show more

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Cited by 42 publications
(27 citation statements)
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“…21). Let us note that the bandwidth that is reached by our low-order control scheme is compatible with micromanipulation tasks requirements and similar to bandwidth of other control schemes [27] [21]. …”
Section: A Hac/lac Damping Strategy For In-plane Motion Controlsupporting
confidence: 62%
“…21). Let us note that the bandwidth that is reached by our low-order control scheme is compatible with micromanipulation tasks requirements and similar to bandwidth of other control schemes [27] [21]. …”
Section: A Hac/lac Damping Strategy For In-plane Motion Controlsupporting
confidence: 62%
“…Two new equations are obtained (7) and (8), which describes the Slave subsystem in the Fig. 3, including external forces: (8) Subtracting equations (7) and (8) and after simplifying them, we obtain the equation (9):…”
Section: ǯɩ ďǒƭɂʁƭǜǔƌřǚ ʊ˿ʊǜƭȧ řȭřǚ˿ʊǔʊmentioning
confidence: 99%
“…Finally, Micky Rakotondrabe continue his studies and, in 2015, presented his work about a self-sensing technique, using an actuator as a sensor at the same time [20,46]. This was possible for most actuators with a physically reversible principle, such as piezoelectric materials.…”
Section: Sensorless Bilateral Teleoperation Systemsmentioning
confidence: 99%
“…The difference between figures presenting sensor methods thus far is that, in the case of the proposed control scheme, there are no sensors mediating between the manipulator body and the environment, relative to paper [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19]. The same thing can be noticed in self-sensing piezo-ceramic microcontrollers used for micromanipulation and in [2,20,28,32,41,[43][44][45][46]. The only sensors used in the whole system are position encoders and pressure sensors.…”
Section: Scope Of Studymentioning
confidence: 99%