Introduction

Dimensional change in a solid due to electrochemically driven compositional change is termed electro-chemo-mechanical (ECM) coupling. This effect causes mechanical instability in Li-ion batteries and solid oxide fuel cells. Nevertheless, it can generate considerable force and deformation, making it attractive for mechanical actuation. Here a Si-compatible ECM actuator in the form of a 2 mm diameter membrane is demonstrated. Actuation results from oxygen ion transfer between two 0.1 µm thick Ti oxide\Ce 0.8 Gd 0.2 O 1.9 nanocomposite layers separated by a 1.5 µm thick Ce 0.8 Gd 0.2 O 1.9 solid electrolyte. The chemical reaction responsible for stress generation is electrochemical oxidation/reduction in the composites. Under ambient conditions, application of 5 V DC produces actuator response within seconds, generating vertical displacement of several µm with calculated stress ≈3.5 MPa. The membrane actuator preserves its final mechanical state for more than 1 h following voltage removal. These characteristics uniquely suit ECM actuators for room temperature applications in Si-integrated microelectromechanical systems.

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All‐Solid‐State Electro‐Chemo‐Mechanical Actuator Operating at Room Temperature

Makagon

Wachtel

Houben

et al. 2020

Adv Funct Materials

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Electro‐chemomechanical Contribution to Mechanical Actuation in Gd‐Doped Ceria Membranes

Mishuk

Ушаков

Makagon

et al. 2019

Adv Materials Inter

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Gd‐doped ceria (CGO), one of the most extensively studied oxygen ion conductors, is a low dielectric constant/low mechanical compliance material exhibiting large nonclassical electrostriction. The electromechanical response of the micro‐electromechanical devices with CGO films as an active material described previously can not be attributed exclusively to electrostriction. Here it is shown that, below 1 Hz, in addition to electrostriction (second‐harmonic response), there is a strong contribution of the electro‐chemomechanical effect (ECM, first harmonic response). ECM is the change in mechanical dimensions of ionic and mixed ionic‐electronic conductors as a result of a change in chemical composition induced by an electric field. In batteries, the presence of ECM is highly detrimental. In ceria at room temperature, it was considered to be negligible because of slow oxygen diffusion. This work demonstrates ECM actuation at ambient temperature and moderate electric field (<5 V µm−1). ECM‐induced strain is attributed to reversible oxidation/ reduction of TiO2 layers at the Ti‐CGO interface. At 25 °C, the ECM bending strain is 1.2 × 10−6, increasing exponentially with temperature. These data suggest that with a proper choice of materials, ECM‐type response can be a viable mechanism for mechanical actuation at ambient and also at slightly elevated temperatures.

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Introduction

Cited by 2 publications

References 11 publications

All‐Solid‐State Electro‐Chemo‐Mechanical Actuator Operating at Room Temperature

All‐Solid‐State Electro‐Chemo‐Mechanical Actuator Operating at Room Temperature

Electro‐chemomechanical Contribution to Mechanical Actuation in Gd‐Doped Ceria Membranes

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