Investigating the impact of industrial facility agglomeration on population distribution provides valuable insights for advancing urban and regional development, as well as aiding in planning, forecasting, and achieving regional equilibrium. However, there remains a notable gap in understanding the influence and mechanisms of industrial facility agglomeration on population distribution, particularly when considering different industry types and diverse regions comprehensively. Additionally, conventional panel data used to assess industrial facility agglomeration are constrained by limitations in coverage and timeliness. In contrast, Point of Interest (POI) data offers a superior solution with its real-time, fine-grained, and innovative advantages. This study utilizes real-time and fine-grained POI data in conjunction with the LandScan population raster dataset to precisely assess industrial facility agglomeration in 352 administrative units at the prefecture level and above in China. The key findings of this research can be summarized as follows: (1) factors influencing urban population growth rates have evolved, with increased significance attributed to Government Agencies and Social Groups, alongside a consistent impact from Science, Education, and Cultural Services. (2) The correlation between industrial facility agglomerations and population growth rates displayed linear relationships in 2015 and 2021, with varying strengths and directional shifts. (3) Regional disparities in industrial facility agglomeration patterns underscore the necessity for customized strategies to optimize industrial structures, foster innovation-driven sectors, and promote sustainable population growth.