Investigating the optimum parameters of a negative photoresist to prepare a V-grooved diffraction grating on Si using photolithography and reactive ion etching techniques

Al‒Hadeethi, Yas; Al-Mujtabi, A.; Al-Marzouki, Fahd; Mahmoud, Alaa Y.; Abdel‐Daiem, A. M.; Ansari, M. Shahnawaze

doi:10.1016/j.ceramint.2020.12.185

Cited by 6 publications

(3 citation statements)

References 2 publications

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“…Fabrication techniques used in this study were chosen for their relatively low cost and ease of use in prototyping as well as for their scalability for implementation in industrial applications. Photolithographic techniques are particularly useful for accurately and reproducibly creating regular arrays of structures and can be implemented over large areas and at scales required for mass production. − Due to this versatility, photolithography has been widely used for producing electrocatalysts for gas-evolving electrochemical reactions. ,− ,, In this work, MPP was used to prepare microscale structures on the electrocatalysts. The main difference between MPP and standard photolithography techniques is the position of the photomask relative to that of the ultraviolet (UV) light source.…”

Section: Resultsmentioning

confidence: 99%

Enhancing the Performance of Nickel Electrocatalysts for the Oxygen Evolution Reaction Using Arrays of Self-Cleaning Linear Ridges

Rea,

Pauls,

Taylor

et al. 2024

ACS Appl. Energy Mater.

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The oxygen evolution reaction represents a key source of inefficiency for green hydrogen production. In general, persistent bubbles that grow on the surfaces of an electrode obstruct a portion of the electrochemically active surface area, resulting in a decreased overall efficiency. Microscale features on the surfaces of electrocatalysts can, however, aid in the removal of these adherent bubbles. Gas production and conversion efficiencies have been shown to improve when incorporating linear, ridge-like microscale features onto electrodes. These factors improve with an increase in the separation between these ridges as demonstrated for features with separations up to 200 μm, but the full extent of this trend is not known. In this study, a series of linear, ridge-like features were prepared to seek a separation between these features that yields an optimal performance. The ridge-like features were prepared from nickel (Ni) using microscope project lithography techniques in combination with Ni electrodeposition, which was demonstrated to be a versatile technique for rapidly prototyping these features. At an industrially relevant potential of 1.8 V [vs mercury/mercury oxide (Hg/HgO)] in an alkaline electrolyte, the performance of arrays of the ridge-like features was observed to increase up to a critical separation of ∼300 μm, beyond which the performance decreased and approached that of planar Ni electrocatalysts. At this identified critical separation of features, the current response under chronoamperometry conditions was nearly triple that obtained for the planar Ni electrocatalysts. Observations of growth, coalescence, and detachment of gas bubbles on the microscale ridge-like features achieved using high-speed imaging suggest a possible cause for the improved performance at the identified optimal spacing of the arrays of linear features.

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Section: Resultsmentioning

confidence: 99%

Enhancing the Performance of Nickel Electrocatalysts for the Oxygen Evolution Reaction Using Arrays of Self-Cleaning Linear Ridges

Rea,

Pauls,

Taylor

et al. 2024

ACS Appl. Energy Mater.

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“…microfluidics, 20,21 microelectromechanical systems, 22 textured electrocatalysts, 23 integrated circuits, 24 and micro-to-nanoscale optical components. 25,26 A variety of systems have been reported to demonstrate reliable, low-cost fabrication of microto-nanoscale structures using MPP. These MPP systems have included (i) the use of colored masks to create multilevel structures; 27 (ii) the use of ultraviolet light-emitting diodes (UV-LEDs) as the light source for the fabrication of components, such as nanoscale optical devices; 28,29 and (iii) numerous designs for maskless MPP systems, such as those that use liquid crystal displays or digital micromirror devices in place of a mask or focused electron-beam writing techniques.…”

Section: Introductionmentioning

confidence: 99%

“…Microscope projection photolithography is a versatile and cost-effective method of transferring a pattern to a small substrate (e.g., <1 cm 2 ). This technique can be used to produce patterns without the need for equipment, such as mask aligners, or the need for a clean room environment, since MPP is accomplished without physical contact with the surfaces of a substrate. , As such, MPP is an ideal technique for rapid prototyping in a variety of applications, such as in microfluidics, , microelectromechanical systems, textured electrocatalysts, integrated circuits, and micro-to-nanoscale optical components. , A variety of systems have been reported to demonstrate reliable, low-cost fabrication of micro-to-nanoscale structures using MPP. These MPP systems have included (i) the use of colored masks to create multilevel structures; (ii) the use of ultraviolet light-emitting diodes (UV-LEDs) as the light source for the fabrication of components, such as nanoscale optical devices; , and (iii) numerous designs for maskless MPP systems, such as those that use liquid crystal displays or digital micromirror devices in place of a mask or focused electron-beam writing techniques. − …”

Section: Introductionmentioning

confidence: 99%

Microscale Contacts for Nanowire Characterization Using Microscope Projection Photolithography

Rea,

Zhang,

Mobrhan-Shafiee

et al. 2024

ACS Appl. Nano Mater.

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Microscope projection photolithography (MPP) offers a versatile method of prototyping microscale devices. The benefits of MPP include the ability to create features at a variety of dimensions, the ability to work outside of a clean room, and the ability to use robotic microscope stage controls to adjust the positions of features easily and accurately. This makes MPP a precise, yet flexible technique ideal for manufacturing contact pads that can be used to investigate the properties of individual nanowires. An enormous breadth of research has been dedicated to the synthesis and characterization of nanowires. The properties of individual nanowires can, however, vary greatly between syntheses or within a batch. Characterization of individual nanowires remains an important step in the scale-up of these materials. Their characterization does, however, often require complex and highly sensitive self-assembly techniques to arrange nanowires on substrates with proper placement of electrical contacts. Some work has been done on techniques for the selective characterization of individual nanowires, but those methods rely on using focused electron-beam writing techniques to connect nanowires to pre-existing electrical contacts. The study of nanowires would benefit from a rapid, flexible approach to fabricating contacts for individual nanowires. This study demonstrates a system for fabricating electrical contacts with minimum feature sizes of ∼0.9 μm on individual nanowires (e.g., diameters from <75 to >125 nm) that are positioned randomly on a small substrate (e.g., <1 cm2). Designs for double and quadruple contact pads have been shown to enable the effective measurement of the electrical properties of individual nanowires. The techniques provided herein can provide a rapid, simple, and customizable method of studying individual nanowires.

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Nanosecond pulsed laser etching anti-reflective gratings and synchronous laser annealing for performance optimization of Ag/AZO thin films

Li,

Zhang,

Ruan

et al. 2024

Ceramics International

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Investigating the optimum parameters of a negative photoresist to prepare a V-grooved diffraction grating on Si using photolithography and reactive ion etching techniques

Cited by 6 publications

References 2 publications

Enhancing the Performance of Nickel Electrocatalysts for the Oxygen Evolution Reaction Using Arrays of Self-Cleaning Linear Ridges

Enhancing the Performance of Nickel Electrocatalysts for the Oxygen Evolution Reaction Using Arrays of Self-Cleaning Linear Ridges

Microscale Contacts for Nanowire Characterization Using Microscope Projection Photolithography

Nanosecond pulsed laser etching anti-reflective gratings and synchronous laser annealing for performance optimization of Ag/AZO thin films

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