Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements

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Long slender piezoresistive silicon microprobes are a new type of sensor for measurement of surface roughness. Their advantage is the ability to measure at speeds of up to 15 mm/s, which is much faster than conventional stylus probes. The drawbacks are their small measurement range and tendency to break easily when deflected by more than the allowed range of 1 mm. In this article, previously developed microprobes were tested in the laboratory to evaluate their metrological properties, then tested under industrial conditions. There are several industrial measurement applications in which microprobes are useful. Measurement of the roughness of paper machine rolls was selected for testing in this study. The integration of a microprobe into an existing roll measurement device is presented together with the measurement results. The results are promising, indicating that measurements using a microprobe can give useful data on the grinding process.

Section: Description Of the Selected Microprobe Configurationmentioning

confidence: 99%

“…Contact resonant frequency is much higher and slightly dependent on sample material, 9.6 to 16 kHz [ 24 ] and 14.1 to 14.3 kHz [ 23 ]. Using measurement speeds up to 10 mm/s, wavelengths down to 1 µm can be detected [ 24 ].…”

Section: Description Of the Selected Microprobe Configurationmentioning

confidence: 99%

In-Line Measurement of the Surface Texture of Rolls Using Long Slender Piezoresistive Microprobes

Teir

Lindstedt²,

Widmaier³

et al. 2021

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“…Owing to their high dynamics (determined from a fundamental flexural resonance frequency of

at a quality factor of

, cf. Table 1 ), cantilever microprobes maintain the trackability of step-like features (with inclination variations of up to 70°) during high-speed contact probing of at least

[ 9 ].…”

Section: Introductionmentioning

confidence: 99%

“…Under such high-speed conditions, however, the integrated silicon tip is affected by substantial wear [ 11 ] and was, therefore, replaced by a full monocrystalline diamond probing tip glued to the bottom side of the cantilever [ 9 ]. While the dynamics of this probe remain high enough to ensure trackability, it shows oscillating behavior during contact profilometry at a probing force of

and a speed of

[ 9 ].…”

Section: Introductionmentioning

confidence: 99%

Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography

Fahrbach

Nyang’au

et al. 2023

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We addressed the coating 5 mm-long cantilever microprobes with a viscoelastic material, which was intended to considerably extend the range of the traverse speed during the measurements of the 3D surface topography by damping contact-induced oscillations. The damping material was composed of epoxy glue, isopropyl alcohol, and glycerol, and its deposition onto the cantilever is described, as well as the tests of the completed cantilevers under free-oscillating conditions and in contact during scanning on a rough surface. The amplitude and phase of the cantilever’s fundamental out-of-plane oscillation mode was investigated vs. the damping layer thickness, which was set via repeated coating steps. The resonance frequency and quality factor decreased with the increasing thickness of the damping layer for both the free-oscillating and in-contact scanning operation mode, as expected from viscoelastic theory. A very low storage modulus of E′≈100kPa, a loss modulus of E″≈434kPa, and a density of ρ≈1.2gcm−3 were yielded for the damping composite. Almost critical damping was observed with an approximately 130 µm-thick damping layer in the free-oscillating case, which was effective at suppressing the ringing behavior during the high-speed in-contact probing of the rough surface topography.

“…The microprobe demonstrates superior dynamics because of its low mass. Theoretical analysis and experimental results indicate that it can track surfaces with steep features up to traverse speeds of 10 mm/s with high fidelity [ 14 ]. When the probing force is larger than 28 µN, the microprobe can measure a surface of 10 µm amplitude and 11 µm wavelength with the traverse speed up to 15 mm/s without tip flight [ 15 ].…”

Section: Introductionmentioning

confidence: 99%

Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements

Zhou

Ahbe

et al. 2022

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Given their superior dynamics, microprobes represent promising probe candidates for high-speed roughness measurement applications. Their disadvantage, however, lies in the fact that the volume of the microprobe’s silicon tip decreases dramatically during roughness measurement, and the unstable tip geometry leads to an increase in measurement uncertainty. To investigate the factors that influence tip geometry variation during roughness measurement, a rectangular-shaped tip characterizer was employed to characterize the tip geometry, and a method for reconstructing the tip geometry from the measured profile was introduced. Experiments were conducted to explore the ways in which the tip geometry is influenced by tip wear, probing force, and the relative movement of the tip with respect to the sample. The results indicate that tip fracture and not tip wear is the main reason for tip volume loss, and that the lateral dynamic load on the tip during scanning mode is responsible for more tip fracture than are other factors.