2004
DOI: 10.1088/0960-1317/14/9/011
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Investigation for the operation of an integrated peristaltic micropump

Abstract: An investigation into the pumping flow rates and the time-resolved membrane actuation of a microperistaltic pump integrated within a micro total analysis system (μTAS) is presented. The results include (i) the design of the driver circuit to operate the peristaltic micropump, (ii) Michelson interferometer measurements of the pump displacement and (iii) pump flow rate measurements. The peristaltic micropump, configured with three PZT actuated glass membranes and silicon channels, is integrated within the μTAS d… Show more

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Cited by 56 publications
(40 citation statements)
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“…The larger area of the IPDP thin fi lm in the stacked-type-I micropump leads to a larger electromagnetic force as well as a larger power, and results in a fl ow rate higher than those of the stacked-type micropumps II, III, and IV. According to authors' previous results (24) and other researchers' works, (23,27,28) the maximum fl ow rate occurred at the resonant frequency of the micropump due to the maximum defl ection. As shown in Table 1, the larger area of the IPDP thin fi lm leads to a larger electromagnetic force that results in a higher fl ow rate due to a larger defl ection.…”
Section: Flow Ratementioning
confidence: 76%
“…The larger area of the IPDP thin fi lm in the stacked-type-I micropump leads to a larger electromagnetic force as well as a larger power, and results in a fl ow rate higher than those of the stacked-type micropumps II, III, and IV. According to authors' previous results (24) and other researchers' works, (23,27,28) the maximum fl ow rate occurred at the resonant frequency of the micropump due to the maximum defl ection. As shown in Table 1, the larger area of the IPDP thin fi lm leads to a larger electromagnetic force that results in a higher fl ow rate due to a larger defl ection.…”
Section: Flow Ratementioning
confidence: 76%
“…To establish a quantitative link between these parameters, the pumping rate was measured at various applied pneumatic pressures (10,20,30 and 40 psi) and frequencies (5-70 Hz). An observation in Figure 8a shows the liquid pumping rates correlate with pneumatic pressures.…”
Section: Evaluation Of Pumping Ratementioning
confidence: 99%
“…[4][5][6] With further development, whole microfluidic systems were realized, which were made up of multiple elements to achieve certain functions. These parts comprise either of the monolithic microfluidic components 7 or of the microfluidic components with the external components/devices.…”
Section: Introductionmentioning
confidence: 99%