Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors

Mohanan, Ajay Achath; Islam, Md. Shabiul; Ali, Sawal Hamid Md; Parthiban, Rajendran; Ramakrishnan, N.

doi:10.3390/s130202164

Cited by 25 publications

(11 citation statements)

References 20 publications

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“…In this work, FEM simulation of a layered SAW device is performed by using COMSOL Multiphysics. The FEM study for different piezoelectric materials has been used, validated and reported by researchers [ 7 , 24 , 25 ]. In first phase of our study, a 2D FEM model of AlN/SiO 2 /Si SAW resonator structure without a sensing layer is investigated.…”

Section: Problem Formulationmentioning

confidence: 99%

“…SAW sensors are popular because of their real time detection capability, simple fabrication procedure, small size, excellent repeatability, high sensitivity and low cost [ 4 ]. Other than gas sensing applications, the SAW devices also serve a wide range of other applications, such as temperature sensor [ 5 ], pressure sensor [ 6 ] and mass detector [ 7 ] and so forth. Moreover, currently, SAW bio-sensors and microfluidics [ 8 ] are also gaining attention for point-of-care health monitoring.…”

Section: Introductionmentioning

confidence: 99%

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FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure

Aslam

Jeoti

Karuppanan

et al. 2018

Sensors

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A Finite Element Method (FEM) simulation study is conducted, aiming to scrutinize the sensitivity of Sezawa wave mode in a multilayer AlN/SiO2/Si Surface Acoustic Wave (SAW) sensor to low concentrations of Volatile Organic Compounds (VOCs), that is, trichloromethane, trichloroethylene, carbon tetrachloride and tetrachloroethene. A Complimentary Metal-Oxide Semiconductor (CMOS) compatible AlN/SiO2/Si based multilayer SAW resonator structure is taken into account for this purpose. In this study, first, the influence of AlN and SiO2 layers’ thicknesses over phase velocities and electromechanical coupling coefficients (k2) of two SAW modes (i.e., Rayleigh and Sezawa) is analyzed and the optimal thicknesses of AlN and SiO2 layers are opted for best propagation characteristics. Next, the study is further extended to analyze the mass loading effect on resonance frequencies of SAW modes by coating a thin Polyisobutylene (PIB) polymer film over the AlN surface. Finally, the sensitivity of the two SAW modes is examined for VOCs. This study concluded that the sensitivity of Sezawa wave mode for 1 ppm of selected volatile organic gases is twice that of the Rayleigh wave mode.

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Section: Problem Formulationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure

Aslam

Jeoti

Karuppanan

et al. 2018

Sensors

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“…As compared to the two previous waves, the energy confinement for Sezawa occur at the boundary between GaN layer and the bulk substrate. In term of sensitivity, Sezawa modes offer a higher sensitivity and higher operating frequency compared to Rayleigh wave with similar configuration [30]. Accordingly, a very sensitive sensor with wide range of frequency covering can be achieved by using a Sezawa-based device.…”

Section: Resultsmentioning

confidence: 99%

A Theoretical Study of Surface Mode Propagation with a Guiding Layer of GaN/Sapphire Hetero-Structure in Liquid Medium

et al. 2018

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Gallium Nitride (GaN) is considered as the second most popular semiconductor material in industry after silicon. This is due to its wide applications encompassing Light Emitting Diode (LED) and power electronics. In addition, its piezoelectric properties are fascinating to be explored as electromechanical material for the development of diverse microelectromechanical systems (MEMS) application. In this article, we conducted a theoretical study concerning surface mode propagation, especially Rayleigh and Sezawa mode in the layered GaN/sapphire structure with the presence of various guiding layers. It is demonstrated that the increase in thickness of guiding layer will decrease the phase velocities of surface mode depending on the material properties of the layer. In addition, the Q-factor value indicating the resonance properties of surface mode appeared to be affected with the presence of fluid domain, particularly in the Rayleigh mode. Meanwhile, the peak for Sezawa mode shows the highest Q factor and is not altered by the presence of fluid. Based on these theoretical results using the finite element method, it could contribute to the development of a GaN-based device to generate surface acoustic wave, especially in Sezawa mode which could be useful in acoustophoresis, lab on-chip and microfluidics applications.

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“…The device material is quartz with the cut 'poling' rotated about the y-axis, and so resonance is expected around 250 MHz, for its material and geometry, so frequency domain solutions are solved for around this operation frequency, with similar methodology to Ref. [14].…”

Section: Fea Modelmentioning

confidence: 99%

Determining biosensing modes in SH-SAW device using 3D finite element analysis

Brookes

Bufacchi

Kondoh

et al. 2016

Sensors and Actuators B: Chemical

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a b s t r a c tSurface acoustic wave (SAW) sensors are electromechanical devices that exploit the piezoelectric effect to induce elastic (acoustic) waves which are sensitive to small perturbations: for example specific binding and recognition of disease biomarkers. Shear horizontal surface acoustic waves (SH-SAWs) are particularly suited to biosample analysis as the wave is not completely radiated and lost into the liquid medium (e.g., blood, saliva) as is the case, for example, in a device implementing Rayleigh waves. Here, using 3D finite element analysis (FEA) the nature of waves launched on a particular quartz device is investigated with respect to the cut of the quartz, the addition of gold guiding layers, and the addition of other linear elastic materials of contrasting acoustic properties. It is demonstrated that 3D FEA analysis showing the device's frequency shift with added guiding layer height reveals a proportional relationship in agreement with the Sauerbrey equation from perturbation theory. It is directly shown, given certain device parameters and a gold guiding layer, that shear horizontally polarized waves are launched on the surface with a dominant mode frequency around 250 MHz. This would be an appropriate biosensing mode in Point of Care (POC) testing for the particular properties of certain disease biomarkers delivered via a liquid medium.

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Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors

Cited by 25 publications

References 20 publications

FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure

FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure

A Theoretical Study of Surface Mode Propagation with a Guiding Layer of GaN/Sapphire Hetero-Structure in Liquid Medium

Determining biosensing modes in SH-SAW device using 3D finite element analysis

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