Investigation of a-C:F films as hydrogenated diamond-like carbon and low-k materials

Oh, Teresa; Choi, Chi Kyu; Lee, Kwang-Man

doi:10.1016/j.tsf.2004.07.022

Cited by 16 publications

(26 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Fluorine atoms substitute hydrogen atoms that bond to carbon atoms in a-C:H:F lms to form CF n (n # 3) groups. 65 To summarize, F-DLC lms with low concentrations of uorine that substitutes hydrogen sustain the diamond-like structure because of the formation C-F and C-CF groups. C-CF and C-F groups are present at the uorine content below 20 at.%.…”

Section: The Structures Of F-dlc Lmsmentioning

confidence: 96%

See 1 more Smart Citation

Recent advances in the mechanical and tribological properties of fluorine-containing DLC films

Zhang

Wang

et al. 2015

RSC Adv.

View full text Add to dashboard Cite

Fluorine easily substitutes hydrogen in DLC films due to its monovalence and high electronegativity. The peculiarities of fluorine bestow low surface energy, low inner stress, good thermal stability, preeminent tribological properties and biocompatibility on fluorine-containing, diamond-like carbon (F-DLC) films.Although there are some reviews that introduce the important advances in DLC films, they are not particularly focused on the promising F-DLC films. In this review, we mainly concentrate on the mechanical and tribological properties of F-DLC films. The mechanical properties, including hardness, modulus, and inner stress, will be discussed thoroughly. More importantly, the eminent tribological properties of F-DLC films would be emphasized based on the surface passivation and repulsive forces induced by fluorine atoms from the surface chemical and micro-mechanical viewpoints. Finally, some existing challenges and promising breakthroughs about F-DLC films are also proposed. It is expected that these films would be produced on a large scale and applied extensively in industrial applications such as micro-electro-mechanical systems, ultralarge scale integrated circuits, thin film transistor liquid crystal displays and biomedical devices.

show abstract

Section: The Structures Of F-dlc Lmsmentioning

confidence: 96%

“…Models of the bonding structures in a-C:F films with the variation of the gas flow rate ratio: the left one depicts a-C:F films with electron-rich groups; the right one describes a-C:F films with electron-deficient groups 65. Reproduced from ref 65.…”

mentioning

confidence: 99%

Recent advances in the mechanical and tribological properties of fluorine-containing DLC films

Zhang

Wang

et al. 2015

RSC Adv.

View full text Add to dashboard Cite

show abstract

“…Figure 2(a) shows the FTIR spectrum of the films. The C−F vibrational modes for the wavenumber range of 400-2,200 cm −1 are listed in Table 1 [25,26]. The broad peak at 2,950 cm −1 for the CH n group and the bond at 1,600 cm −1 of C=C stretching are so weak that it is not easily found.…”

Section: Sample Characterizationmentioning

confidence: 99%

Hydrophobic, mechanical, and tribological properties of fluorine incorporated hydrogenated fullerene-like carbon films

Zhang

Gao

et al. 2013

Friction

View full text Add to dashboard Cite

Fluorine-incorporated hydrogenated fullerene-like nanostructure amorphous carbon films (F-FLC) were synthesized by employing the direct current plasma enhanced chemical vapor deposition (dc-PECVD) technique using a mixture of methane (CH 4 ), tetra-fluoromethane (CF 4 ), and hydrogen (H 2 ) as the working gases. The effect of the fluorine content on the bonding structure, surface roughness, hydrophobic, mechanical, and tribological properties of the films was systematically investigated using Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), Raman analysis, atomic force microscope (AFM), contact angle goniometer, nano-indenter, and reciprocating ball-on-disc tester, respectively. The fluorine content in the films increased from 0 to 2.1 at.% as the CF 4 gas flow ratio increased from 0 to 3 sccm, and incorporated fluorine atoms existed in the form of C-F X (X = 1, 2, 3) bonds in the film. The fullerene nanostructure embedded in the hydrogenated amorphous carbon films was confirmed by Raman analysis. The water contact angle was significantly increased because of fluorine doping, which indicates that the hydrophobicity of the carbon films could be adjusted to some extent by the fluorine doping. The hardness and elastic modulus of the films remained relatively high (22 GPa) as the fluorine content increased. Furthermore, the friction coefficient of the carbon films was significantly reduced and the wear resistance was enhanced by fluorine doping.

show abstract

“…In addition to the D and G bands, a peak located at 2850 cm −1 (Fig. a), corresponding to a CH stretching vibration bond , was observed in the SF 6 ‐plasma treated sample. Both the I D / I G decrease and the presence of a CH stretching bond are due to reticulation of the amorphous carbon film induced by SF 6 .…”

Section: Resultsmentioning

confidence: 94%

Acetylene coating on cornstarch plastics produced by cold plasma technology

2013

View full text Add to dashboard Cite

This study tested the effectiveness of sulfur hexafluoride (SF6) plasma treatment and acetylene (C2H2) plasma polymerization for turning thermoplastic starch (TPS) hydrophobic. A surface modification method was employed using different precursor gases, SF6 and C2H2, and a combined treatment using SF6 followed by C2H2 (SF6/C2H2) and then the reverse, using C2H2 first followed by SF6 (C2H2/SF6). The same self‐bias voltage and treatment time was used for each gas across all treatments: −100 V and 480 s for SF6, −200 V and 2400 s for C2H2. The best results were obtained from a C2H2‐coated surface, treated with SF6 (C2H2/SF6). This process increased the contact angle to >128°. When treated in the opposite order (SF6/C2H2), the contact angle decreased to 90° and a homogeneous, smoother coating was produced. Raman spectroscopy confirmed the presence of D and G bands in plasma‐treated films. Under these treatments, all surfaces presented a contact angle higher than 75°.

show abstract

Investigation of a-C:F films as hydrogenated diamond-like carbon and low-k materials

Cited by 16 publications

References 19 publications

Recent advances in the mechanical and tribological properties of fluorine-containing DLC films

Recent advances in the mechanical and tribological properties of fluorine-containing DLC films

Hydrophobic, mechanical, and tribological properties of fluorine incorporated hydrogenated fullerene-like carbon films

Acetylene coating on cornstarch plastics produced by cold plasma technology

Contact Info

Product

Resources

About