2002
DOI: 10.1088/0022-3727/35/9/307
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Investigation of a pulsed oxygen microwave plasma by time-resolved two-photon allowed laser-induced fluorescence

Abstract: The density of atomic oxygen in pulsed microwave excited oxygen plasmas has been measured by means of time-resolved two-photon laser-induced fluorescence. The plasma source is a slot antenna type that is operated at 2.45 GHz. Calibration of the measurements has been performed by the use of a two-photon transition of xenon in order to obtain absolute densities of atomic oxygen in the downstream zone. Besides the influence of pulse frequency on the time-averaged density, we also studied pulsed plasmas at h… Show more

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Cited by 33 publications
(22 citation statements)
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“…The initiation step of APTES decomposition is attributed to atomic oxygen. To the best of our knowledge, contrary to O atoms [52][53][54][55], the singlet state O 2 (a 1 ∆ g ) has never been identified as a reactive species with regards to dehydrogenation of organosilicon compounds. Afterglow studies with TEOS [52][53][54] and HMDSO [48,53] all reinforce this conclusion.…”
Section: Mechanisms At Stakementioning
confidence: 95%
See 1 more Smart Citation
“…The initiation step of APTES decomposition is attributed to atomic oxygen. To the best of our knowledge, contrary to O atoms [52][53][54][55], the singlet state O 2 (a 1 ∆ g ) has never been identified as a reactive species with regards to dehydrogenation of organosilicon compounds. Afterglow studies with TEOS [52][53][54] and HMDSO [48,53] all reinforce this conclusion.…”
Section: Mechanisms At Stakementioning
confidence: 95%
“…Finally, Georg et al [55] proposed that a major reason for thin films improvement of roughness and homogeneity is the enhanced oxidation of unwanted carbohydrogen compounds in the HMDSO molecules by atomic oxygen.…”
Section: Mechanisms At Stakementioning
confidence: 99%
“…There are three likely processes to produce atomic oxygen; one is to dissociate an oxygen molecule into two oxygen atoms via the reaction e + O 2  2O + e, which has a reaction rate coefficient k 1 = 4.2  10 -9 exp(-5.6/T e ) [37], where T e is in eV. This reaction rate decreases rapidly with T e < 5.6 eV; thus it needs about 5 eV electrons to effectively dissociate O 2 into atomic oxygen.…”
Section: Design Of the Devicementioning
confidence: 99%
“…The measured transmission of the interferential filters are respectively T Xe = 38% and T O = 81%. According to the literature [1], the optical branching ratio for the atomic oxygen transition 3p 3 P J → 3s 3 S is equal to unity (a 0 (O) = 1) and a 0 (Xe) = 0.733 for xenon transition 6p'[3/2] 2 → 6s'[1/2] 1 while the ratio of the two-photon excitation cross sections is σ (2) Xe /σ…”
Section: Introductionmentioning
confidence: 99%