Investigation of an atmospheric pressure radio-frequency capacitive plasma jet

Laimer, J.; Haslinger, Stefan; Meissl, W.; Hell, J.; Störi, H.

doi:10.1016/j.vacuum.2005.03.009

Cited by 37 publications

(44 citation statements)

References 6 publications

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“…The a mode discharge can cover the whole gap spacing, while the c mode discharge can only cover a small part of the electrodes due to the limitation of the maximum power output of the RF power supply used in this lab. The similar phenomena were also reported by Laimer et al [25,26]. In this paper, we also distinguish these two discharge modes by visual differences of the luminous structures of the discharges as described in Ref.…”

Section: Discharge Characteristics Of Rf Apgds With Air or Pure Nitrogensupporting

confidence: 88%

“…In this paper, the equivalent circuit model of the discharge with the consideration of the stray capacitance (C s ), which represents the PTFE spacers between the electrodes, etc., is employed as illustrated in Fig. 11, where C P and R P represent the sheath capacitance of the discharge and the resistance of the bulk plasma, respectively [25]. The capacitance of the collisional sheath can be expressed as [39] …”

Section: Theoretical Analysis Using An Equivalent Circuit Modelmentioning

confidence: 99%

“…is added in order to generate a flux of chemically active species [6,13,14,17,[25][26][27]. In actual applications, large volume consumptions of helium or argon would increase the capital costs of this technology.…”

Section: Introductionmentioning

confidence: 99%

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Electrical Features of Radio-frequency, Atmospheric-pressure, Bare-metallic-electrode Glow Discharges

Sun

Wang

et al. 2007

Plasma Chem Plasma Process

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Radio-frequency (RF), atmospheric-pressure glow discharge (APGD) plasmas with bare metallic electrodes have promising prospects in the fields of plasma-aided etching, deposition, disinfection and sterilization, etc. In this paper, an induced gas discharge approach is proposed for obtaining the RF, atmospheric-pressure, c-mode, glow discharges with pure nitrogen or air as the primary plasma-working gas using bare metallic electrodes. The discharge characteristics, including the discharge mode, the breakdown voltage and discharge voltage for sustaining a mode and/or c mode discharges, of the RF APGD plasmas of helium, argon, nitrogen, air or their mixtures using a planar-type plasma generator are presented in this study. The uniformity (no filaments) of the discharges is confirmed by the images taken by an iCCD with a short exposure time (10 ns). The effects of different gap spacings and electrode materials on the discharge characteristics, the variations of the sheath thickness and the electron number density are also studied in this paper.

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Section: Discharge Characteristics Of Rf Apgds With Air or Pure Nitrogensupporting

confidence: 88%

Section: Theoretical Analysis Using An Equivalent Circuit Modelmentioning

confidence: 99%

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Electrical Features of Radio-frequency, Atmospheric-pressure, Bare-metallic-electrode Glow Discharges

Sun

Wang

et al. 2007

Plasma Chem Plasma Process

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“…One the past years considerable progress has been achieved in the development of sources of nonequilibrium low-temperature plasma by using highfrequency discharge [66][67][68][69][70][71][72][73][74][75][76][77][78][79]. A stable volume atmospheric pressure glow discharge between two metal electrodes can be generated in pure helium or chemically active gases strongly diluted with helium, by applying voltage with a frequency of 13.56 MHz on the electrodes.…”

Section: Specific Features Of Electrical Gaseous Discharges At Atmospmentioning

confidence: 99%

Plasmachemical synthesis in low-temperature atmospheric pressure plasma

2015

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“…However, up to now, only helium or argon can be employed as the primary plasma-forming gas for generating the rf APGD plasmas using bare metal electrodes, and the amount of the admixed gas ͑e.g., O 2 , N 2 , CF 4 , etc.͒ used for producing a flux of chemically active species is also very small. [1][2][3][4][5][6][7][8] In actual applications, the chemically active species and their concentrations in plasmas can influence the qualities of the treated materials obviously. Nitrogen-containing plasmas have been employed widely for improving surface hardness, wear and corrosion resistance, fatigue life of different materials, as well as for changing the wettability and promoting adhesion of the surfaces of organic polymers.…”

mentioning

confidence: 99%